Applied Materials, Inc.

Levent Colak

Ludovic Godet

Andre P Labonte

Embodiments described herein provide for methods of forming optical device structures. The methods utilize rotation of a substrate, to have the optical device structures formed thereon, and tunability of etch rates of a patterned resist disposed over the substrate and one of a device layer or the substrate to form the optical device structures without multiple lithographic patterning steps and angled etch steps.

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Santa Clara, CA, United States of America

Levent Colak