Leland Stanford Junior University

Levent Beker

Zhenan Bao

In certain examples, methods and semiconductor structures are directed to a strain sensor integrated with a membrane substrate, a pressure sensor, and a plurality of material layers. The material layers are to integrate the strain sensor, the pressure sensor and the membrane substrate, with the pressure and strain sensors operating co-operatively to indicate, in response to a force applied to or towards the pressure sensor, characterization information of the force applied and of deformation of the membrane substrate. In a more specific example, the strain sensor and the membrane substrate are integrated with the aforesaid at least one of the material layers, and at least a portion of the pressure sensor and the membrane substrate are stacked to permit sensing of the force concurrently by the strain sensor and the pressure sensor.

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Stanford, CA, United States of America

Levent Beker