International Business Machines Corporation

Lester A Pederson

Carlton G Willson

Robert Dennis Miller

Scott Arthur MacDonald

John C Cheng

James Economy

Hiroyuki Hiraoka

Donald Clifford Hofer

William D Hinsberg, Iii

Barbara D Grant

Robert T Lynch, Jr

James S Wong

Duane E Johnson

Ying Ying Cheng

James R Lyerla

An optical data storage device having a substrate has guide ridges, or reverse grooves, in a concentric or spiral shape formed thereon, and disposed in a plane parallel to and disposed from the substrate surface. The device further has pits formed approximately midway between the guide ridges and disposed in the substrate and having bottoms below the plane of the substrate surface. A method for manufacturing the optical data storage device having both address pits and guide ridges is disclosed. A dual tone photosensitive material is applied to a substrate, exposed with a laser light source comprising two distinct wavelengths, and developed to provide a desired bipolar geometry thereon.

Patterning process for bipolar optical storage medium

A process for making an image oxygen-reactive ion etch barrier using a polysilane that is resistant to resistive ion etching and is also a positive acting resist.

Process for making an imaged oxygen-reactive ion etch barrier

A resist sensitive to electron beam (and X-ray) radiation but resistant to reactive ion etching is formulated from a novolac resin and a sensitizer which is a terpolymer of sulfur dioxide, an olefin is hydrocarbon and an unsaturated ether.

Terpolymer resist compositions

The resistance of a resist of plasma etching is enhanced by first cross-linking the resist and then contacting it with an aqueous solution of NaOH or KOH. The process is useful to form microcircuits having increased density of geometry.

Process for forming microcircuits

Positive electron beam resists are prepared by reacting a film which is a copolymer of methyl methacrylate and methacrylic acid with a tertiary amine.

Process for preparing electron beam resists

Growing community of inventors

San Jose, CA, United States of America

Lester A Pederson