Carl Zeiss Smt Gmbh

Carl Zeiss Microscopy Gmbh

Leybold Gmbh

Leonid Gorkhover

Gennady Fedosenko

Hin Yiu Anthony Chung

Michel Aliman

Alexander Laue

Armin Schoeppach

Ulrich Bingel

Gerd Klose

Stefan Wiesner

Claudia Ekstein

Michael Widmann

Ruediger Reuter

Guenter Albrecht

Hans-Joachim Trefz

Martin Antoni

Johannes Rau

Thorsten Benter

Peter Awakowicz

Albrecht Ranck

Rudiger Reuter

Valerie Derpmann

Johnannes Rau

Andreas Gorus

Joerg Winter

Marc Boeke

Achim Von Keudell

Theodore Lundquist

Rüdiger Reuter

Marc BÖKE

Jörg Winter

A mass spectrometer includes an ion trap, which has an interior for storing ions, a signal generator, which is connected to an electrode of the ion trap, which delimits the interior, for coupling in a voltage signal, in particular a radiofrequency voltage signal, and an ionization device for ionizing a gas to be ionized and supplied to the interior. The ionization device is connected to the signal generator in order to use the voltage signal (U, U, U) of the signal generator, which is coupled into the electrode, for generating ions.

Mass spectrometer comprising an ionization device

A microlithographic apparatus comprises an optical wavefront manipulator. The latter includes an optical element and a gas-tight cavity that is partly confined by the optical element or contains it. A gas inlet device directs a gas jet towards the optical element. The location, where the gas jet impinges on the optical element after it has passed through the cavity, is variable in response to a control signal supplied by a control unit. A gas outlet is in fluid connection with the vacuum pump so that, upon operation of the vacuum pump, the pressure within the cavity is less than 10 mbar even if the gas jet passes through the cavity.

Microlithographic apparatus and method of changing an optical wavefront in such an apparatus

The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.

Mass spectrometer, use thereof, and method for the mass spectrometric examination of a gas mixture

An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.

Ionization device with mass spectrometer therewith

A method for examining a gas by mass spectrometry includes: ionizing the gas for producing ions; and storing, exciting and detecting at least some of the produced ions in an FT ion trap. Producing and storing the ions in the FT ion trap and/or exciting the ions prior to the detection of the ions in the FT ion trap includes at least one selective IFT excitation, such as a SWIFT excitation, which is dependent on the mass-to-charge ratio of the ions. The disclosure further relates to a mass spectrometer. A mass spectrometer includes: an FT ion trap; and an excitation device for storing, exciting, and detecting ions in the FT ion trap.

Method for examining a gas by mass spectrometry and mass spectrometer

A method and a device for the material-fit connection of an optical element to a frame are disclosed.

Method and device for connecting an optical element to a frame

Growing community of inventors

Ulm, Germany

Leonid Gorkhover