Average Co-Inventor Count = 6.34
ph-index = 14
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Applied Materials, Inc. (56 from 13,771 patents)
56 patents:
1. 12456611 - Systems and methods for controlling a voltage waveform at a substrate during plasma processing
2. 12435963 - Apparatus and method for controlling edge ring variation
3. 12237148 - Plasma processing assembly using pulsed-voltage and radio-frequency power
4. 12057292 - Feedback loop for controlling a pulsed voltage waveform
5. 11948780 - Automatic electrostatic chuck bias compensation during plasma processing
6. 11935724 - Symmetric VHF source for a plasma reactor
7. 11848176 - Plasma processing using pulsed-voltage and radio-frequency power
8. 11791138 - Automatic electrostatic chuck bias compensation during plasma processing
9. 11776789 - Plasma processing assembly using pulsed-voltage and radio-frequency power
10. 11728124 - Creating ion energy distribution functions (IEDF)
11. 11699572 - Feedback loop for controlling a pulsed voltage waveform
12. 11668553 - Apparatus and method for controlling edge ring variation
13. 11587766 - Symmetric VHF source for a plasma reactor
14. 11508554 - High voltage filter assembly
15. 11482402 - Methods and apparatus for processing a substrate