Fanuc Robotics North America, Inc.

Medar, Inc.

Ismeca Europe Semiconductor Sa

Industrial Technology Institute

Leonard H Bieman

Gary J Rutledge

Franz Willems Ulrich

Kevin G Harding

Edward Roney

Mark A Michniewicz

A method and system are provided including an optical head which moves relative to an object at a vision station to scan a projected pattern of imagable electromagnetic radiation across the surface of an object to be inspected at a relatively constant linear rate to generate an imagable electromagnetic radiation signal. In one embodiment, the electromagnetic radiation is light to develop dimensional information associated with the object. The optical head includes at least one projector which projects a grid of lines and an imaging subsystem which includes a trilinear array camera as a detector. The camera and the at least one projector are maintained in fixed relation to each other. Three linear detector elements of the array camera extend in a direction parallel with the grid of lines. The geometry of the optical head is arranged in such a way that each linear detector element picks up a different phase in the grid pattern. As the optical head is scanned across the surface of interest, the detector elements are continuously read out. Depth an each point on the surface is calculated from the intensity reading obtained from each of the detector elements that correspond to the same point on the surface. In this way, the phases of the pattern are calculated from the three intensity readings obtained for each point. In another embodiment, the imagable electromagnetic radiation is polarized and the response of the detector elements is polarization sensitive. The generated images are based on polarization for the surface.

Scanning phase measuring method and system for an object at a vision station

Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a light source for propagating light to the device and an image detector that receives light from the device. Also included is a light sensor assembly for receiving a portion of the light from the light source. The light sensor assembly produces an output signal responsive to the intensity of the light received at the light sensor assembly. A controller controls the amount of light received by the image detector to a desired intensity range in response to the output from the light sensor. The image detector may include an array of imaging pixels. The imaging system may also include a memory device which stores correction values for at least one of the pixels in the array of imaging pixels. To minimize or control thermal drift of signals output from an array of imaging pixels, the machine-vision system may also include a cooling element attached to the imaging device. The light source for propagating light to the device may be strobed. The image detector that receives light from the device remains in a fixed position with respect to the strobed light source. A translation element moves the strobed light source and image detector with respect to the device. The strobed light may be alternated between a first and second level.

Imaging for a machine-vision system

The subject invention is an optical detection assembly ( ) for detecting dispensed material ( ). The detection assembly ( ) includes a housing ( ) having a number of optical sensors ( ) mounted to the housing ( ). A material applicator ( ) is mounted within a central opening ( ) of the housing ( ) and extends through the opening ( ) such that the sensors ( ) substantially surround the applicator ( ) to continuously detect the material ( ) being dispensed through the applicator ( ). The subject invention also includes the method of detecting the material ( ) being dispensed upon a workpiece ( ) utilizing a robotic apparatus ( ) having an articulated arm ( ) with the housing ( ) mounted to the arm ( ).

Detection assembly for detecting dispensed material

A 3-D camera system (10) includes a light source (12) and a grating (14) spaced at a predetermined distance from the light source (12). The light source (12) and grating (14) project a shadow of the grating (14) on an object (16). Images of the object (16) with the grating (14) shadows projected thereon are captured by a sensor (18) in a video camera (17). A processor (19) converts the images to a three dimensional bit map of the object (16). The light source (12) includes a plurality of at least three rows of light sources (20) defining a matrix (22) whereby different rows of the matrix (22) may be illuminated to produce different grating (14) shadows on the object (16).

3-D camera

A method of controlling a robot system (20) includes using a camera (40) to generate a first, two-dimensional image of a marking (42) on a workpiece (32). A second, two-dimensional image of the marking (42) is generated from a second perspective. The two images are then used to generate a three-dimensional location of the marking in real space relative to the robot (22). Since the visible marking (42) corresponds to a desired path (48), the three-dimensional location information is used to automatically program the robot (22) to follow the desired path.

Vision guided automatic robotic path teaching method

An optical method and system for measuring bore hole diameter, out-of-roundness and lobing and a probe for use therein are provided. A ring of structured light is initially formed or projected on the inner surface of a bore hole by optical components supported within a housing of the probe. A lens system also supported within the housing images the ring of light. Image merging lenses of the lens system reform the image at a video camera located at a window of the housing such that two or more arcs of the ring form a magnified image with the image of the arcs being shifted in space such that all the arcs can be viewed by the camera. The video camera image is captured by a frame grabber/computer. A computer calculates the location of the arcs and from this information determine bore diameter and other bore properties such as out-of-roundness and lobing. The method, system and probe have the ability to capture information around the entire bore without movement of the camera or any of the optical components supported within the housing.

Method and system for measuring cavities and probe for use therein

Scanning phase measuring method and system for an object at a vision

An optical measuring system comprises an illumination arrangement including a light source, grating, and lens, and an image acquisition arrangement, including a lens, grating, and camera. A mechanical translation device moves the grating in a plane parallel to a reference surface to effect a phase shift of a projected image of the grating on the contoured surface to be measured. A second mechanical translation device moves the lens to effect a change in the contour interval. A first phase of the points on the contoured surface is taken, via a four-bucket algorithm, at a first contour interval. A second phase of the points is taken at a second contour interval. A controller, including a computer, determines a coarse measurement using the difference between the first and second phases. The controller further determines a fine measurement using either the first or second phase. The displacement or distance, relative to the reference plane, of each point is determined, via the controller, using the fine and coarse measurements.

Growing community of inventors

Farmington Hills, MI, United States of America

Leonard H Bieman