Cvd Equipment Corporation

Leonard A Rosenbaum

Karlheinz Strobl

James Acquaviva

Sandra Gainey

Paul J Decker

Ajay Kumar

Fluid reactors include a sealed housing enclosing a reactor core that includes at least one substrate-free multichannel reactor core element. Each reactor core element is made from a non-substrate mounted, open pore cellular network material having an asymmetric, tortuous, bi-continuous two-phase material structure and contains multiple perforating fluid channels. Multiple reactor core elements can be serially and/or parallelly piped in a sealed manner to form a reactor core for a fluid reactor with a higher production capacity.

Fluid reactors

The use of deposition modules groups for each CVD deposition position including at least two deposition modules, together with a Motion Control System that controls and confines the motion of said deposition modules, enables a quick deposition module exchange at the deposition locations of On-Line or Off-Line CVD coating system. This results in a high volume large area CVD coating system that can increase the commercial viability of a given CVD system design through production throughput increases, production cost reductions, overall higher process flexibility and/or improved film quality.

High-throughput CVD system

An automatic valve shut-off system useful for gas cylinders and the like employing a pneumatically actuated rotatable shaft to engage the valve handle on the cylinder. A control box is located remotely and conduits carry pressurized gas to energize the pneumatic activator. Solenoid or manual type operated switches select the delivery of pressurized gas to the cylinder and a pneumatic feed back device is provided to indicate the position of the valve handle.

Growing community of inventors

Old Bethpage, NY, United States of America

Leonard A Rosenbaum