Brooks Automation Gmbh

Edwards Vacuum LLC

Leonard A Loranger

Robert P Sullivan

Allen J Bartlett

Joseph Chopy, Jr

Maureen C Buonpane

John J Varone

Paul E Amundsen

Oliver J Dumas

Doreen J Ball-DiFazio

Ronald N Morris

A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.

Helium management control system

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Medfield, MA, United States of America

Leonard A Loranger