Morphotonics Holding B.v.

Leon Willem Veldhuizen

Jan Matthijs Ter Meulen

Bram Johannes Titulaer

Adrianus Johannes Van Erven

An assembly includes a master for imprinting of micro-structures and nano-structures. The master has on its upper surface an active area with relief structure for imprinting of the micro-structures and nano-structures, and the master has a thickness d. The assembly includes frame pieces arranged around and flushing along the outer circumference of the master, with the frame pieces having a thickness d. The thickness dof the frame pieces deviates from the thickness dof the master by at most 250 μm. A a flexible stamp has improved alignment.

Assembly for replicating flexible stamps from a master

A flexible stamp comprising at least three layers, an upper layer as a texturing layer () having a relief area (B), a strengthening layer () and a protective layer (), characterized in that the strengthening layer () has a thermal expansion coefficient of 10 ppm/° C. or lower, a Young's modulus in the range of 10 GPa-200 GPa, a layer thickness of below 300 μm and an area which at least covers the relief area (B).

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Utrecht, Netherlands

Leon Willem Veldhuizen