Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Suss Microtec Lithography Gmbh (1 from 62 patents)
1 patent:
1. 10937681 - Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner