Honeywell International Inc.

Len Hom

John D Mize

Robert Prater

David K Chan

Gilbert Amador

Kenneth I Niemela

Peter J Kang

The invention includes coil constructions configured for utilization in PVD chambers, and also includes methods of forming coil constructions suitable for utilization in PVD chambers. The coil constructions can include one or more cup projections extending from an outer periphery of a coil body. The cup projections are one-piece with the coil body, and have a recess extending therein with a projecting lip extending entirely around the recess. The cup projections further comprise a fastener receiver within the recess configured to receive a fastener for connecting the coil with the chamber. The methods of forming the coil construction can include identifying separate components of an assembly associated with a coil replacement kit, and forming a one-piece construction which can be substituted for at least two of the components.

Coil constructions configured for utilization in physical vapor deposition chambers, and methods of forming coil constructions

The invention includes a coil support assembly having an insulator interfacing a surface of a shield disposed within a processing chamber. The insulator has an extension which extends through the shield. A second insulator is disposed between the shield and a coil and contacts a protrusion extending from the coil. A fastener is disposed through the first insulator and extends through the second insulator and into the protrusion. The fastener is electrically isolated from the shield by the first insulator. The invention includes coil assemblies containing the described coil support configuration. The invention further includes a method of supporting a coil within a processing chamber having a shield disposed therein. Insulators are inserted to extend from an outer side of the shield through a thickness of the shield. A coil is mounted within the chamber by inserting fasteners through each insulator into bosses which-protrude outwardly from the coil body.

Single piece coil support assemblies, coil constructions and methods of assembling coil constructions

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Dublin, CA, United States of America

Len Hom