Asm Technology Singapore Pte Ltd

Lei Song

Jiangwen Deng

Wui Fung Sze

A method of scanning a surface of an object using a confocal imaging system comprises the steps of obtaining first, second and third confocal images of the surface of the object when the object is illuminated respectively by light rays having first, second and third spectral waveforms, and using a camera to capture responsive signals from the object illuminated by the first, second and third spectral waveforms. The first, second and third spectral waveforms are distinguishable from one another and each spectral waveform has overlapping portions relative to another spectral waveform. Thereafter, heights of a plurality of points on the surface of the object corresponding to the plurality of points on each confocal image are determined based on said captured responsive signals.

Vertical chromatic confocal scanning method and system

An apparatus for inspecting a surface of an object has a first light source operative to illuminate the object without producing a patterned image onto the object. A second light source projects a patterned image produced from a first polarized light from the second light source onto the object, wherein the first polarized light is polarized in a first polarization direction. A third light source projects the patterned image produced from a second polarized light from the third light source onto the object, wherein the second polarized light is polarized in a second polarization direction different from the first polarization direction. An imaging device views the surface of the object when the object is illuminated separately by the first, second and third light sources respectively for determining a profile of the surface of the object.

Growing community of inventors

Chengdu, China

Lei Song