Globalfoundries Singapore Pte. Ltd.

Nanyang Technological University

Evoqua Water Technologies Pte. Ltd.

Lei Shi

Rong Wang

Laurentia Setiawan

Joselito Reyes Butiu

Bor Shen Chan

A nanofiltration membrane comprising a selective layer comprising or consisting of poly(amide-imide) cross-linked with polyallylamine is provided. A method of manufacturing a nanofiltration membrane and use of a nanofiltration membrane in a water softening process that is carried out at a low pressure of less than about 2 bar are also provided.

Nanofiltration membrane and method of manufacturing a nanofiltration membrane

Device and method of configuring a device to process a wafer is disclosed. The device includes a wafer chuck configured to mount the wafer, a dry wafer processing chamber configured to enclose the wafer chuck, a humidity sensor configured to measure relative humidity (RH) at an outlet of the dry wafer processing chamber, a humidity controller coupled to the humidity sensor, the humidity controller being configured to detect a change in RH above a threshold, and a process chamber controller coupled to the humidity controller. The change is triggered by a leakage in deionized water used as a coolant for cooling the wafer chuck and the wafer during the processing. The process chamber controller is configured to trigger a shutdown of the processing of the wafer in response to the leakage.

Method and system for detecting a coolant leak in a dry process chamber wafer chuck

Growing community of inventors

Singapore, Singapore

Lei Shi