Lucent Technologies Inc.

Alcatel-lucent USA Inc.

Lay-Lay Chua

Yang Yang

Chun-Ting Liu

Young-Kai Chen

Andreas Leven

Rose Fasano Kopf

Vincent Etienne Houtsma

Wei-Jer Sung

A method for fabricating a bipolar transistor includes forming a vertical sequence of semiconductor layers, forming an implant mask on the last formed semiconductor layer, and implanting dopant ions into a portion of one or more of the semiconductor layers. The sequence of semiconductor layers includes a collector layer, a base layer that is in contact with the collector layer, and an emitter layer that is in contact with the base layer. The implanting uses a process in which the implant mask stops dopant ions from penetrating into a portion of the sequence of layers.

Bipolar transistors with vertical structures

A method for making an ICD or MEOD structure includes dry etching a structure to produce one or more via holes in an upper layer of the structure. The dry etching step stops on a metal layer that underlies the upper layer in the structure. The method also includes cleaning the dry etched structure with an aqueous solution that includes hydrogen peroxide and either an ammonium salt or an amine salt.

Removal of metal veils from via holes

Growing community of inventors

Cambridge, United Kingdom

Lay-Lay Chua