Imra America, Inc.

University of Central Florida Research Foundation, Inc.

Lawrence Shah

Donald J Harter

Martin E Fermann

Gyu Cheon Cho

Ingmar Hartl

Mark P Bendett

Zhenlin Liu

Salvatore F Nati

Rajesh S Patel

Alan Y Arai

Xinhua Gu

James Bovatsek

Tadashi Yamamoto

Jingzhou Xu

Martin C Richardson

Xinhu Gu

Jin Young Sohn

Konstantin Vodopyanov

The invention describes classes of robust fiber laser systems usable as pulse sources for Nd: or Yb: based regenerative amplifiers intended for industrial settings. The invention modifies adapts and incorporates several recent advances in FCPA systems to use as the input source for this new class of regenerative amplifier.

Yb: and Nd: mode locked oscillators and fiber systems incorporated in solid-state short pulse laser systems

Yb: and Nd: mode-locked oscillators and fiber systems incorporated in solid-state short pulse laser systems

Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse width sufficiently short so that material is efficiently removed by nonlinear optical absorption from the region and a quantity of heat affected zone and thermal stress on the material within the region, proximate to the region, or both is reduced relative to a quantity obtainable using a laser with longer pulses. In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a composite material.

Laser-based material processing apparatus and methods

A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.

Femtosecond laser processing system with process parameters controls and feedback

Systems and methods for providing laser texturing of solid substrates are disclosed. The texturing may be used to provide grayscale images obtainable from substrates, which may include steel, aluminum, glass, and silicon. In some embodiments, images may be obtainable from the substrate by modifying the reflective, diffractive, and/or absorptive features of the substrate or the substrate surface by forming random, periodic, and/or semi-periodic micro-structure features on the substrate (or substrate surface) by an ultrafast laser pulse train. The ultrafast pulse train may be modulated in order to vary, for example, optical exposure time, pulse train intensity, laser polarization, laser wavelength, or a combination of the aforementioned. The ultrafast pulse train and the substrate may be scanned with respect to each other to provide different optical energies to different regions of the substrate (or substrate surface). In some embodiments, the image is provided by making one or more passes of the ultrafast laser pulse train relative to the substrate.

Ultrashort laser micro-texture printing

A method for wavelength tunable output from a broadband spectrum using a quasi phase-matched optical parametric amplifier/difference frequency generator (CQPM OPA/DFG)-based apparatus involves changing the relative timing of a pump pulse with respect to a seed pulse. The temporal variation varies the location of the spatial/temporal overlap of the spectrally narrow pump pulse over the spectrally broad seed spectrum occurring within the CQPM nonlinear medium. This overlap position determines the portion of the seed pulse that is phase-matched as the signal in the OPA or the seed for DFG. Piezo-electric fiber stretchers may be employed to vary the relative pulse timing and enables tuning of the output from the OPA or DFG without the use of any moving parts. Associated apparatus is disclosed.

Chirped quasi phase-matched optical parametric amplifier/difference frequency generator (CQPM OPA/DFG)-based optical tuning method, apparatus, and applications

YB: and ND: mode-locked oscilltors and fiber systems incorporated in solid-state short pulse laser systems

Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse repetition rate sufficiently high so that material is efficiently removed from the region and a quantity of unwanted material within the region, proximate to the region, or both is reduced relative to a quantity obtainable at a lower repetition rate. Embodiments of an ultrashort pulse laser system may include a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a semiconductor substrate. Workpiece materials may include metals, inorganic or organic dielectrics, or any material to be micromachined with femtosecond, picosecond, and/or nanosecond pulses.

Laser-based material processing methods and systems

Femtosecond laser processing system with process parameters, controls and feedback

Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse repetition rate sufficiently high so that material is efficiently removed from the region and a quantity of unwanted material within the region, proximate to the region, or both is reduced relative to a quantity obtainable at a lower repetition rate. Embodiments of an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a semiconductor substrate. Workpiece materials may also include metals, inorganic or organic dielectrics, or any material to be micromachined with femtosecond, picosecond, and/or nanosecond pulses.

Growing community of inventors

Maitland, FL, United States of America

Lawrence Shah