Speedfam Corporation

Lawrence O Day

Joseph V Cesna

In accordance with the present invention, there is provided a machine for performing abrading operations. The preferred machine includes an upper lap plate and lower lap plate mounted for rotation about its own vertical axis. A carriage means supports the upper lap plate, and a frame means supports the carriage means at spaced locations in a manner permitting the carriage means to reciprocate vertically within the frame means relative to the lower lap plate for performing abrading operations and to provide access for loading and unloading the workpieces. The upper lap plate also may reciprocate vertically and independently of and relative to the carriage means for performing abrading operations and to provide access for loading and unloading the workpieces. Additionally, the abrading machine may be provided with a temperature control device having at least one tube disposed adjacent the lower lap plate for coolant fluid flow. The device includes means for reversing the coolant flow supply from the inlet to the outlet while the abrading device is operational for effectuating more even temperature control across the lap plates. The abrading machine also may be provided with an abrasive fluid distribution system having a plurality of ring-like troughs being mountable above the upper lap plate concentrically and which are spaced radially from one another to supply abrasive fluid uniformly to the lapping surfaces. Each trough is provided with a plurality of passages that are positioned in a circumferentially staggered relation to uniformly supply abrasive fluid from the troughs to the lapping surfaces.

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Fremont, CA, United States of America

Lawrence O Day