Optimetrix Corporation

Eaton-optimetrix Inc.

Lawrence A Wise

Edward H Phillips

X-Y position measurement apparatus is employed with feedback controlled X-Y positioning apparatus for positioning a workpiece stage at a desired X-Y coordinate position in response to signals indicative of the actual position and the desired position of the workpiece stage. A normalization circuit is employed for gain correction of the signals indicative of the actual position of the workpiece stage.

Feedback-controlled workpiece positioning system

A shutter is rotatably mounted in a housing for opening and closing a shutter aperture in the housing. The shutter is coupled to a drive unit for unidirectionally rotating the shutter with the same velocity profile to open and close the shutter aperture during each exposure period. This drive unit includes a drive motor and a control circuit having a source of position and velocity reference data and a feedback control loop configurable for either position or velocity control of the shutter as determined by a control command.

Shutter mechanism

A shock and vibration isolation system having a plurality of isolators supporting a utilization device is disclosed. Each isolator has two gas driven pistons, pivotally mounted in a frame and is connected to an accumulator/controller that supplies controlled amounts of pressurized gas. A sensor in each isolator senses the position of the utilization device with respect to a base sitting on the ground, and the accumulator/controller adds gas to or exhausts gas from the pistons to counteract changes in position detected by the sensor. An electronic control circuit is connected between the sensor and the accumulator/controller to supply a properly compensated signal from the sensor to control the accumulator/controller.

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Sunnyvale, CA, United States of America

Lawrence A Wise