Centre National De La Recherche Scientifique

Université Paris-Sud 11

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Alcatel Lucent

Université Paris—sud

Laurent Vivien

Delphine Marris-Morini

Gilles Rasigade

Etienne Gaufres

Nicolas Izard

Jean-Marc Fedeli

Guang-Hua Duan

Eric Doris

Alexis Abraham

Ségolène Olivier

Edmond Gravel

Didier Boquet

Diego Perez-Galacho

Delphine Morini

Melissa Ziebell

A waveguide including a substrate, an assembly of semiconductor regions consecutively extending on the substrate along a direction corresponding to a propagation direction of an electromagnetic wave having a wavelength noted &#x3bb;, the semiconductor regions being electrically alternately doped with a first conductivity type and with a second conductivity type along the propagation direction, a dielectric layer interposed between two consecutive semiconductor regions, at least one pair of consecutive elementary structures having a dimensions along the propagation direction adapted to &#x3bb; to form a grating where the light propagates with no diffraction effects.

Waveguide for an electro-optic capacitive modulator

A component or device is provided for the detection or the measurement in parallel of one or more specific types of biological or chemical target products. This component includes a group of nanotubes selected and/or functionalized to interact with the target product, around an optical waveguide. Thus, an optical coupling is produced between the optical waveguide and one or more optical characteristics of these nanotubes, the modifications of which are evaluated in the presence of the target product. In addition, a method is provided for manufacturing and preparing such a component or device, and a detection method using them, as well as a post-manufacture preparation method comprising a specific functionalization for different target products starting from the same type of pluripotent generic component. Also provided is a family of PFO-based functionalization polymers.

Multi-target photonic biosensor, and method for manufacturing and preparing same

A photonic component is provided including at least one linear optical waveguide, of which an active portion is surrounded over all or part of its periphery by a grouping of one or more essentially semiconducting nanotubes. These nanotubes interact with their exterior environment in an active zone extending on either side of the optical waveguide, to thus induce an optical coupling between an electrical or optical signal applied to the nanotubes and on the other hand an optical signal in the active portion of the waveguide. Such a component can carry out bipolar electro-optical functions as light source, or modulator or detector, inside the optical guide, for example with an electro-optical coupling between on the one hand an electrical signal applied between the electrodes, and on the other hand an optical signal emitted or modified in the active portion of the optical waveguide towards the remainder of the optical guide.

Nanotube electro-optical component, optronic or optical link-based hybrid integrated circuit integrating this component, and method of fabrication

A component, device and improved electro-optical modulation system for increasing compactness, favoring the adaptation of optical and electrical waves, and a method of fabrication. Such a component exhibits a waveguide architecture devised so that the length of the path followed by the luminous flux exhibits, with the length of the path traversed by the electrical control signal, a determined difference for decreasing or compensating for the difference in the speeds of propagation of the luminous flux and of the electrical signal. In particular, the modulation zone includes a path of the luminous flux winding around itself and successively crossing at least two indentations emanating from at least two of these control elements. It thus exhibits a length greater than that traversed by the electrical signal, for example between a first and a second region of interaction between this control signal and this luminous flux.

Semiconductor on insulant high-rate compact optical modulator having a winding waveguide structure

An electro-optic modulation component is provided, in particular on an SOI (semiconductor-on-insulator) substrate, improved for better performance at data rates above 10 Gb/s. This improvement is obtained by reducing the influence of the capacitive effects of the structure and of its environment, and more particularly in which the influence of the capacitance of the structure itself is limited by reducing the access resistance in the doped regions or the influence of the capacitive effect of the environment is reduced by modifying the structure of the substrate vertically beneath the active region, for example by thinning the silicon substrate or the insulator, or a combination of these features. The invention furthermore relates to a process for fabricating such a component and to a device or system that includes such a component. These improvements are applicable in 3D integration assembly processes and to electronic and optical hybrid circuits.

High data-rate SOI optical modulator including a modified structure for reducing the capacitive effect between doped areas and a substrate

In a process for fabrication of an optical slot waveguide on silicon, a thin single-crystal silicon film is deposited on a substrate covered with an insulating buried layer; a local thermal oxidation is carried out over the entire depth of the thin single-crystal silicon film in order to form an insulating oxidized strip extending along the desired path of the waveguide; an insulating or semi-insulating layer is deposited on the silicon film; two openings having vertical sidewalls are excavated over the entire thickness of this insulating or semi-insulating layer, said openings being separated by a narrow gap constituting an insulating or semi-insulating vertical wall that will be the material of the slot; single-crystal silicon is grown in the openings and right to the edges of the insulating or semi-insulating wall; and then the upper part of the silicon is etched in order to complete the geometry of the waveguide.

Process for making a slot-type optical waveguide on silicon

Growing community of inventors

Vauhallan, France

Laurent Vivien