Commissariat a L'energie Atomique Et Aux Energies Alternatives

Commissariat a L'energie Atomique

California Institute of Technology

Other

Université Grenoble Alpes

Centre Hospitalier Universitaire Grenoble Alpes

Commissariat a L'energies Alternatives

Analytical Pixels Technology-Apix Technology

Centre National De La Recherche Scientifique

Universite Paris Cité

Université Des Sciences Et Technologies De Lille 1

Apix Analytics

Vmicro

Laurent Duraffourg

Philippe Andreucci

Eric Colinet

Sebastien Hentz

Pierre Labeye

Boris Taurel

Eric Ollier

Edward B Myers

Jeremie Ruellan

Charles-Marie Tassetti

Frederic Progent

Michael Roukes

Bernard Viala

Guillaume Jourdan

Thomas Ernst

Jean-Sébastien Danel

Sébastien Hentz

Pierre Puget

Julien Arcamone

Joshua B Whiting

Lise Bilhaut

Mélanie Petitjean

Mickael Lee Roukes

Salim Boutami

Jean-Marc Fedeli

Serge Gidon

Claude Chabrol

Emmanuel Ollier

Jean-Guillaume Coutard

Alain Gliere

Marc Faucher

Thomas Alava

Thierry Verdot

Caroline Coutier

Carine Marcoux

Ivan Favero

Benjamin Walter

Pierre Brianceau

Sebastien Labarthe

Sébastien Labarthe

Nicolas Aubert

Stephan Chabardes

Régis Barattin

Peter Thomas Stevens

Stephane Minoret

Hadley Videlier

Alexandre Teulle

Sebastien Vigne

Romain Mahieu

Pierre Allain

Michael L Roukes

Bernard Legrand

Joshua Whiting

Frédéric Progent

Jérémie Ruellan

Stéphane Minoret

The invention relates to a device for detecting a gaseous species by photoacoustic effect. The device comprises a substrate, inside which a cavity is formed. A light source is disposed on the substrate, in such a way that a part of the substrate extends between the light source and the cavity. The device is arranged in such a way that the light, emitted by the light source, is propagated through the substrate, before reaching the cavity.

Compact photoacoustic detection device

Photoacoustic detecting device (), intended to be applied, via a contact face (), against a medium to be analysed, the device comprising: The photoacoustic detecting device is optimized to increase the amplitude of the photoacoustic wave detected by the acoustic transducer.

Device for detecting an analyte via photoacoustic detection

The invention relates to a device for cooling an organ locally, that includes an elongate stem including a far end intended to make contact with an organ to be cooled and comprising including a cooling element having a cold finger, a crystal that has a capacity to cool via excitation at a set excitation wavelength, said crystal being positioned adjacent to said cooling element, an optical guide that is able to convey a light signal at said excitation wavelength and that opens onto said crystal, and an illuminating system including at least one light source, which light source is arranged to emit said light signal.

Device for localized cooling of an organ

An opto-mechanical resonator including a waveguide formed by a plurality of first strips spaced apart from one another; and two mirrors disposed facing one another, which mirrors are optically reflective over at least part of a guide wavelength range of the waveguide. The waveguide extends between the two mirrors, and forms therewith an optically resonant cavity. At least part of the waveguide is held such that it is suspended over a substrate by at least one deformable mechanical element.

Subwavelength waveguide opto-mechanical resonator

An element of a photoacoustic sensor combines an optomechanical resonator and a photoacoustic cavity. The photoacoustic cavity is formed by a measurement chamber, traversed by a pulsed excitation beam. The optomechanical resonator is formed by an optical resonator, a mechanical element for being set in rapid oscillations, by an optical signal confined in the optomechanical resonator, and in slow oscillations, by an acoustic wave generated in the photoacoustic cavity. A measurement beam is sent into the optical resonator, where it carries out several passages via the mechanical element. The optical properties thereof at the output of the optical resonator are therefore dependent on the oscillations of the mechanical element. A low-frequency-amplitude-modulated high-frequency signal can be obtained, with the amplitude modulation representing the acoustic wave in the measurement chamber. An accurate, low-noise, and highly compact method is enabled for making measurements with a photoacoustic effect.

Photoacoustic sensor with optomechanical coupling

A measuring device includes a first light source for emitting an excitation beam at an excitation wavelength; and an excitation optical cavity, optically resonant at the excitation wavelength, and arranged such that it receives the excitation beam; a second light source for emitting a measurement beam at a measurement wavelength; and a mechanical element mounted such that it can move about an elastic recovery position and/or such that it is elastically deformable, located both on the optical path of the excitation beam in the excitation optical cavity and on the optical path of the measurement beam, and capable of being displaced and/or deformed by the excitation beam. One of either the excitation beam or the measurement beam is capable of causing the movable and/or deformable mechanical element to oscillate. The measuring device can in particular be used as a gas sensor or as a mass spectrometer.

Measuring device based on an optical measurement in an opto-mechanical cavity

An optomechanical system including a guide structure, to guide a light beam; and two waveguide segments. Each guide structure include beams that together form two combs partially nested one in the other. At least one beam is free to move in translation along an axis orthogonal to the long axis of the guide structure. A displacement into an optical phase shift, while limiting additional effects on the intensity.

System for transduction of displacement to optical phase shift

An optical sensor includes an optical device including a microresonator, laid out to guide a light beam along a closed loop optical path, and an injection and/or extraction waveguide, optically coupled to the microresonator; a photodetector, arranged at the output of the injection and/or extraction waveguide; and an analysis device, receiving a signal supplied by the photodetector, and deducing therefrom information relative to a displacement. The microresonator is constituted of a plurality of elementary waveguides spaced apart from each other, and arranged one after the other according to a loop shaped layout. The optical sensor offers increased sensitivity to the measurement of nanometric displacements.

Displacement sensor with segmented ring microresonator

A heat flux sensor including at least one optical resonator, suspended on a support, the optical resonator intended to be suspended in a gaseous environment, at least one first device intended to introduce a measurement light beam into the waveguide, at least one second collection device, intended to collect a detection light beam coming from the optical resonator and a device for heating of the optical resonator.

Heat flux sensor that implements at least one optical resonator, gas sensor and Pirani gauge comprising at least one such sensor

A generator of an ion beam is provided, including an ionization chamber provided with an inlet of a fluid to be ionized; a source of ionizing particles configured to impact the fluid in an impact zone of the ionization chamber so as to generate ions; and an extractor of ions generated in a direction of an outlet zone of the generator, the extractor including at least two electrodes, a first electrode referred to as input electrode laterally bordering the impact zone, and at least one second electrode referred to as intermediate electrode located in the impact zone, the at least two electrodes being configured to generate a voltage gradient in the impact zone, with the voltage gradient being configured to direct the generated ions to the outlet zone of the generator.

MEMS device for generating an ion beam

A physical sensor comprising a substrate, a movable mass, said mass being able to be moved by an external force, a first optical resonator, a light wave guide for measurement and a light wave guide for detection, a rigid plate which are able to modify the optical resonance frequency of said optical resonator by moving closer and away the same, a lever arm rotatably hinged to the substrate by a pivot connection and the mass being movably integral with the transmitting means, the rigid plate being disposed relative to the mass and to the pivot connection such that the lever arm transmits to the rigid plate, in an amplified manner, the displacement of the mass.

Opto-mechanical physical sensor with an improved sensitivity

A device for analyzing a fluid, including a layer including a plurality of sensors of MEMS and/or NEMS type, a layer including a mechanism controlling the sensor and for processing information transmitted by the sensors, the control and processing mechanism being electrically connected to the detectors, and a layer positioned on the layer including the sensors on a side of a face including the sensors including a mechanism spatially and temporally distributing the fluid on the sensors.

Analysis device including a MEMS and/or NEMS network

A gas analysis system includes a fluidic channel for flow of a gas to be analyzed, a detector in the channel and adapted for measuring interactions of the gas with the detector, the detector including a resonator of the electromechanical nanosystem (NEMS) type and a heating system for heating a part of the detector, an actuation device for vibrationally actuating the resonator according to an excitation signal applied to an input of the detector, a detection device adapted for providing an output electric signal representative of the vibrations of the resonator, a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of the detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and a processing device configured for determining from the changes a fluidic characteristic of the gas.

System and method for analyzing a gas

Optomechanical device for actuating and/or detecting movement of a mechanical element, in particular for gravimetric detection. It includes a support with a mechanical element anchored to the support which is designed to move relative to the element, and a device for actuating and/or detecting movement or of variations in frequency of movement of the element. A portion of the device is arranged beneath at least part of the element, between the element and the support. The device includes a fixed optical device with at least one optical waveguide arranged beneath all or part of the element at a determined distance from the element, and which is designed to propagate at least one optical wave having a given wavelength designed to interact with the element. The optical waveguide is at a determined distance from the mechanical element so that the evanescent field of the optical waveguide interacts with the mechanical element.

Optomechanical device for actuating and/or detecting movement of a mechanical element, in particular for gravimetric detection

The invention relates to a measurement system including a network of nanoelectromechanical system (NEMS) resonators, characterized in that: each one of said resonators includes: an electrostatic activation device capable of generating a vibration of a beam exposed to said excitation signal, at least one piezoresistive stress gauge made of a doped semiconducting material, extending from the beam so as to detect a movement of said beam, the variation in the electrical resistance of said at least one gauge supplying an output signal; said network includes at least two groups of resonators, each group including at least two resonators having an identical empty resonance frequency, each group of resonators having an empty resonance frequency different from that of each other group; the resonators forming each group are connected in parallel; the groups of resonators forming said network are connected in parallel; said system includes a reading device designed to supply an excitation signal at the network input and to determine the resonance frequency of a group of resonators which is selected by injecting, into said excitation signal, a frequency component corresponding to the empty resonance frequency of each selected group of resonators, and by identifying, in the output signal of the network, a resonance frequency component of the selected group of resonators.

Measurement system including a network of nanoelectromechanical system resonators

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Voiron, France

Laurent Duraffourg