Asml Netherlands B.v.

Laurens Anthony Sanderse

Erik Roelof Loopstra

Tammo Uitterdijk

In an immersion lithographic apparatus, a final element is disclosed having, on a surface nearest the substrate, a layer bonded to the surface and having an edge barrier, of the same material as the layer, extending from the layer away from the substrate to shield the final element from a liquid. In an embodiment, the final element is attached to the apparatus via the layer and/or edge barrier, which may be made of a material with a coefficient of thermal expansion lower than the coefficient of thermal expansion of the final element.

Growing community of inventors

Eindhoven, Netherlands

Laurens Anthony Sanderse