Brooks Automation Gmbh

Crossing Automation, Inc.

Laurence Dulmage

Jed Keller

David K Cheng

Eric Winger

David Adams

Lawrence Wise

J B Price

Jb Price

A modular cluster tool is disclosed. According to one embodiment, a system, comprises a wafer transfer station that includes a first vacuum chamber that stores a plurality of semiconductor wafers. The system also includes an equipment front end module interface, and two or more shuttle lock interfaces.

Linear wafer drive for handling wafers during semiconductor fabrication

A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.

Method and apparatus for semiconductor processing

Growing community of inventors

Nevada City, CA, United States of America

Laurence Dulmage