Uchicago Argonne, LLC

The University of Chicago

Argonne National Laboratory

Laura R Skubal

Tijana Rajh

Alan L McArthur

Marion C Thurnauer

David M Tiede

Jovan M Nedelijkovic

Natalia Meshkov

A system and method for identifying and making quantitative determinations of different deposits on a portion thereof, determining that the deposit is a contaminant and decontaminating at least the portion of the system is disclosed. The system comprises a controller, a sensing portion and a decontamination portion. The controller contains information about at least one noncontaminant. The sensing portion communicates with at least the controller and the portion of the system and is adapted to detect the deposit. The decontaminating portion communicates with at least the controller and is adapted to decontaminate the portion of the system.

Semiconductor-based detection and decontamination system

An article of manufacture and method of forming nanoparticle sized material components. A semiconductor oxide substrate includes nanoparticles of semiconductor oxide. A modifier is deposited onto the nanoparticles, and a source of metal ions are deposited in association with the semiconductor and the modifier, the modifier enabling electronic hole scavenging and chelation of the metal ions. The metal ions and modifier are illuminated to cause reduction of the metal ions to metal onto the semiconductor nanoparticles.

Semiconductor assisted metal deposition for nanolithography applications

Growing community of inventors

West Brooklyn, IL, United States of America

Laura R Skubal