Comlase Ab

Lauerant Krummenacher

Anand Srinivasan

N Peter Blixt

Christofer Silvenius

Svante Soderholm

Carl-Fredrik Carlstrom

L Karsten V Lindstrom

The invention relates to a method using dry etching to obtain contamination free surfaces on of a material chosen from the group comprising GaAs, GaAlAs, InGaAsP, and InGaAs to obtain nitride layers on arbitrary structures on GaAs based lasers, and a GaAs based laser manufactured in accordance with the method. The laser surface is provided with a mask masking away parts of its surface to be prevented from dry etching. The laser is then placed in vacuum. Dry etching is then performed using a substance chosen from the group containing: chemically reactive gases, inert gases, a mixture between chemically reactive gases and inert gases. A native nitride layer is created using plasma containing nitrogen. A protective layer and/or a mirror coating is added.

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Huddinge, Sweden

Lauerant Krummenacher