Semilab Semiconductor Physics Laboratory Co., Ltd.

Semilab Sdi LLC

Laszlo Dudas

Zoltan Kiss

Lubomir L Jastrzebski

Gyorgy Nadudvari

Nicolas Laurent

Zsolt Kovacs

Imre Lajtos

Zoltan Tamas Kiss

In an example implementation, a method includes illuminating a wafer with excitation light having a wavelength and intensity sufficient to induce photoluminescence in the wafer. The method also includes detecting photoluminescence emitted from a portion of the wafer in response to the illumination, and detecting excitation light reflected from the portion of the wafer. The method also includes comparing the photoluminescence emitted from the portion of the wafer and the excitation light reflected from the portion of the wafer, and identifying one or more defects in the wafer based on the comparison.

Micro photoluminescence imaging

A method that includes: illuminating a wafer with excitation light having a wavelength and intensity sufficient to induce photoluminescence in the wafer; filtering photoluminescence emitted from a portion of the wafer in response to the illumination; directing the filtered photoluminescence onto a detector to image the portion of the wafer on the detector with a spatial resolution of 1 &#x3bc;m&#xd7;1 &#x3bc;m or smaller; and identifying one or more crystallographic defects in the wafer based on the detected filtered photoluminescence.

Micro photoluminescence imaging with optical filtering

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Pécel, Hungary

Laszlo Dudas