Samsung Display Co., Ltd.

Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Lasse Büsing

Choong-Ho Lee

Arnold Gillner

Doh-Hyoung Lee

Sung-Sik Yun

Tong-Jin Park

Nelli Hambach

Stephan Eifel

Jens Holtkamp

Alexander Gatej

Patrick Gretzki

Martin Traub

A laser processing apparatus includes: a laser generator that generates a laser beam, a diffractive optical element that divides the laser beam generated by the laser generator into a plurality of sub-laser beams, and a beam gap adjustor that adjusts a gap between neighboring ones of the plurality of sub-laser beams. Therefore, by installing a diffractive optical element that divides a laser beam that is generated by the laser generator into the plurality of sub-laser beams and a beam gap adjustor to adjust a gap between a plurality of sub-laser beams, the laser processing apparatus can form a processing pattern of various resolutions in a shadow mask while improving a processing speed of the shadow mask.

Laser processing apparatus

A laser processing apparatus includes a laser generator for generating laser beams, a diffraction optic element for dividing the laser beam generated by the laser generator into a plurality of sub-laser beams, and a beam number controller for controlling the number of the plurality of sub-laser beams. Accordingly, the diffractive optic element that splits a laser beam generated by the laser beam generator into a plurality of sub-laser beams and the beam number controller that controls the number of sub-laser beams are provided so that the processing speed of a processing target can be improved and, at the same time, the number of laser beams can be promptly controlled, thereby promptly forming various patterns of the processing target.

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Aachen, Germany

Lasse Büsing