Von Ardenne Asset Gmbh &Co. Kg

Lars Ullmann

Maik Vieluf

Ekkehart Reinhold

The disclosure relates to a method for coating a substrate with particles, wherein the following method steps are carried out in a vacuum: positioning a substrate surface of the substrate to be coated in a vacuum and in the direction of a region in which there are disposed solid particles with which the substrate surface is to be coated; and; and introducing electrons into the solid particles for electrostatic charging of the solid particles in such a way that a force brought about by the electrostatic charging separates the solid particles from one another and accelerates them in the direction of the substrate surface of the substrate for coating of the substrate surface with at least a portion of the separated solid particles. A device that can be used in accordance with the disclosure has a particle container, a substrate holder and an electron source.

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Stolpen, Germany

Lars Ullmann