Fraunhofer Usa, Inc.

Michigan State University

Other

Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Lars Haubold

Thomas Schuelke

Michael Frank Becker

Qi Hua Fan

David V Tsu

Hans-Joachim Scheibe

John Thomas Slagter

Yaran Mahmut

Michael Petzold

Michael Becker

A magnetic-field-assisted plasma coating system and method are provided. In another aspect, a coating system employs a cathode with a linearly moveable magnetic field. A further aspect employs a workpiece as an anode within which is located an elongated cathode which internally coats a bore of the workpiece. Still another aspect of the present system and method employs an elongated and hollow cathode with at least one magnetic source therein. In yet another aspect, end caps or plates seal against one or more open ends of a workpiece bore to be coated, with a cathode inserted into the bore and a vacuum being created within the bore such that the workpiece itself defines at least a portion of a vacuum chamber.

Magnetic-field-assisted plasma coating system

A single beam plasma or ion source apparatus is provided. Another aspect employs an ion source including multiple magnets and magnetic shunts arranged in a generally E cross-sectional shape. A further aspect of an ion source includes magnets and/or magnetic shunts which create a magnetic flux with a central dip or outward undulation located in an open space within a plasma source. In another aspect, an ion source includes a removeable cap attached to an anode body which surrounds the magnets. Yet a further aspect provides a single beam plasma source which generates ions simultaneously with target sputtering and at the same internal pressure.

Single beam plasma source

Fluorinated and hydrogenated diamond-like carbon ('DLC-FH') that have unique optical properties differ as a class from the existing DLC art, whose refractive indices [&#x3b7;]are limited to rather high values above a lower threshold of 1.7, and can range up to about 2.7. The DLC-FH materials can achieve very low refractive indices at 550 nm wavelength, [&#x3b7;], i.e., below 1.5, and especially demonstrated down to 1.3. Moreover, whereas the absorption for the existing DLC art, as quantified by the extinction coefficient [&#x3ba;] at a wavelength of 550 nm, [&#x3ba;] is limited to about 0.04, our DLC-FH material can achieve [&#x3ba;] below 0.01. Both of these attributes, i.e., low [&#x3b7;] and low [&#x3ba;] means that, for the first time, a carbon-based material as represented by the DLC-FH material, can be used for anti-reflection (AR) coating, wherein there are no longer any restrictions in how they can be used to promote low reflectance (with low fit[&#x3b7;]) and high transmittance (with low [&#x3ba;]). A dual-energy deposition process, using a Laser Arc for the high energy component creates a plasma of energized carbon atoms and ions, and excites a down-stream flow of fluorine and hydrogen containing gases to deposit an AR coating on a substrate which may be, windows typical of transportation vehicles (land, sea, air), and buildings.

Fluorinated and hydrogenated diamond-like carbon materials for anti-reflective coatings

A coating based on diamond-like is formed from a plurality of films of diamond-like carbon formed alternatingly over one another and in this respect a film in which no portion or only a much lower portion of doped fluorine is contained. A film in which fluorine or at least fluorine with a higher portion than the film arranged thereunder or thereabove are formed alternatingly over one another. The coating could be manufactured by using a target of pure carbon. Films are deposited on a surface of a substrate by means of a PVD process, with the portion of fluorine contained in doped form. Films are formed alternately being varied by varying a supplied volume flow of a fluorine/carbon compound or sulfur/fluorine compound as a precursor.

Coating based on diamond-like carbon

Growing community of inventors

East Lansing, MI, United States of America

Lars Haubold