Infineon Technologies Ag

L&uuml;der Elbrecht

Robert Aigner

Stephan Marksteiner

Annette S&auml;nger

An acoustic mirror is described which is formed of at least one first insulating layer, a first metal layer disposed thereon, a second insulating layer disposed thereon and a second metal layer disposed thereon. An auxiliary layer is produced on the first insulating layer whereby a recess extending as far as the first insulating layer is created therein. The first metal layer is substantially deposited and removed by chemical/mechanical polishing until the parts of the first metal layer disposed outside the recess are no longer present. The second metal layer is also produced in a recess with the aid of chemical/mechanical polishing. More than two insulating layers and two metal layers can be provided. The first metal layer and the second metal layer can be produced in the same recess.

Growing community of inventors

München, Germany

Lüder Elbrecht

Growing community of inventors

München, Germany

L&uuml;der Elbrecht

Lüder Elbrecht