D2s, Inc.

Kla Tencor Corporation

Kla-tencor Technologies Corporation

Exxothermic, Inc.

Listen Technologies Corporation

Kla-tencor Coporation

Ds2, Inc.

Lance Glasser

Akira Fujimura

Takashi Mitsuhashi

Kazuyuki Hagiwara

Jun Ye

David Lee Brown

Moshe E Preil

James Norman Wiley

Kurt Lehman

Venkatraman Iyer

David Alles

Shauh-Teh Juang

Henrik Nielsen

Guowu Zheng

Kenneth F Hatch

Mansour Kermat

Yung-Ho Alex Chuang

Noah Bareket

Carl Hess

Gaurav Verma

Yalin Xiong

Zain Saidin

Alex Chuang

Christian G Desplat

Disclosed embodiments relate, generally, to beacon systems where a locator beacon is used as a marker for a location of interest, and improving false positive immunity in such beacon systems. Confiner beacons are included in such beacon systems to confine a triggering area for triggering a location indication for a location of interest marked by a locator beacon. In other embodiments, arbitrarily shaped triggering areas are defined using confiner beacons. In other embodiments, errant locator signals are identified and handled (e.g., ignored).

False positive immunity in beacon systems, and related systems, methods, and devices

Embodiments of an electronic system for asynchronous audio and video in and environment includes a server with a connection to a wireless access point or a personal digital device that communicates with the server through the wireless access point. The server receives and stores an audio track that is to accompany a public display. The personal digital device acts as a client to the server. A user interface enables a user of the personal digital device to request an audio track corresponding to the public display. The server initiates a stream of the requested audio track to be wirelessly transmitted to and received by the personal digital device. The personal digital device plays at least some of the requested audio track to the user.

Asynchronous audio and video in an environment

In an environment where video display devices are available for simultaneous viewing, servers provide audio streams to user devices for listening. People may, thus, listen to the audio streams through their user devices while watching the video display devices. An application on the user devices determines which audio streams are available, and the servers may indicate which audio streams are available. The application sends a request to a server to transmit a selected audio stream. The server transmits the selected audio stream, e.g. over a wireless network in the environment. A variety of additional features are enabled by the interaction of the application and the servers.

Interaction of user devices and servers in an environment

A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of HDDs for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an AFE for conditioning a signal representing one sensor analog output, an ADC for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.

Integrated multi-channel analog front end and digitizer for high speed imaging applications

A surface manufactured using variable shaped beam (VSB) shots is disclosed, where either: 1) the left edge of a first VSB shot intersects the top edge of a second VSB shot, and the bottom edge of the first VSB shot intersects the right edge of the second VSB shot; or 2) the left edge of the first VSB shot intersects the bottom edge of a second VSB shot, and the top edge of the first VSB shot intersects the right edge of the second VSB shot; and where neither shot crosses a field boundary of the VSB charged particle beam writer.

Method and system for design of a reticle to be manufactured using variable shaped beam lithography

A method for fracturing or mask data preparation or proximity effect correction of a pattern to be formed on a surface is disclosed in which a plurality of variable shaped beam (VSB) shots are determined, and in which charged particle beam simulation is used to calculate the pattern which the plurality of VSB shots will form on the surface. At least two shots in the plurality of VSB shots overlap each other. In some embodiments, assigned dosages of at least two shots differ before proximity effect correction (PEC). In other embodiments an optimization technique may be used embodiments.

A method for optical proximity correction (OPC) of a desired pattern for a substrate is disclosed in which a plurality of variable shaped beam (VSB) shots are determined which can form on a surface an OPC-corrected version of the desired substrate pattern. Shots within the plurality of VSB shots are allowed to overlap each other. Dosages of the shots may also be allowed to vary with respect to each other. The union of the plurality of shots may deviate from the OPC-corrected version of the desired pattern for the substrate. In some embodiments, optimization may be used to minimize shot count. In other embodiments, the plurality of shots may be optionally selected from one or more pre-computed VSB shots or groups of VSB shots, that is, glyphs. A method for creating glyphs is also disclosed, in which patterns that would result on a surface from one or a group of VSB shots are pre-calculated.

Method for optical proximity correction of a reticle to be manufactured using variable shaped beam lithography

A method for fracturing or mask data preparation or proximity effect correction of a desired pattern to be formed on a reticle is disclosed in which a plurality of variable shaped beam (VSB) shots are determined which can form the desired pattern. Shots within the plurality of VSB shots are allowed to overlap each other. Dosages of the shots may also be allowed to vary with respect to each other. The union of the plurality of shots may deviate from the desired pattern. The plurality of shots may be determined such that a pattern on the surface calculated from the plurality of shots is within a predetermined tolerance of the desired pattern. In some embodiments, an optimization technique may be used to minimize shot count. In other embodiments, the plurality of shots may be optionally selected from one or more pre-computed VSB shots or groups of VSB shots.

A method is disclosed in which a plurality of variable shaped beam (VSB) shots is used to form a desired pattern on a surface. In this method some shots within the plurality of shots overlap each other. Additionally, the union of any subset of the plurality of shots differ from the desired pattern. In some embodiments, dosages of the shots vary with respect to each other. In other embodiments, an optimization technique may be used to minimize shot count. In yet other embodiments, the plurality of shots may be optionally selected from one or more pre-computed VSB shots or groups of VSB shots. The method of the present disclosure may be used, for example, in the process of manufacturing an integrated circuit by optical lithography using a reticle, or in the process of manufacturing an integrated circuit using direct write.

Method for manufacturing a surface and integrated circuit using variable shaped beam lithography

Growing community of inventors

Saratoga, CA, United States of America

Lance Glasser