Excellatron Solid State LLC

Lamartine Meda

Ji-Guang Zhang

Eleston Maxie

An apparatus for producing a thin film electrolyte is provided wherein a volatile lithium-containing precursor and a volatile phosphate-containing precursor are mixed into a plasma generated from a plasma source. The mixture is then deposited upon a substrate. The apparatus has a plasma source () having a primary plenum () and a secondary plenum (). The primary plenum is in fluid communication with a source of nitrogen gas () and a source of hydrogen gas (). The secondary plenum is in fluid communication with a first bubbler () and a second bubbler ().

Apparatus for producing thin-film electrolyte

A process of producing a thin film electrolyte is provided wherein a volatile lithium-containing precursor and a volatile phosphate-containing precursor are mixed into a plasma generated from a plasma source. The mixture is then deposited upon a substrate. The process is conducted with the use of a system () having a plasma source () having a primary plenum () and a secondary plenum (). The primary plenum is in fluid communication with a source of nitrogen gas () and a source of hydrogen gas (). The secondary plenum is in fluid communication with a first bubbler () and a second bubbler ().

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Lamartine Meda