Kla Tencor Corporation

Kla-tencor Technologies Corporation

Lalita A Balasubramanian

Lisheng Gao

Ashok V Kulkarni

Brian Duffy

Eliezer Rosengaus

Kris Bhaskar

Mohan Mahadevan

Santosh Bhattacharyya

Tong Huang

Aneesh Khullar

Chris Maher

Chetana Bhaskar

Tommaso Torelli

Cecelia Anne Campochiaro

Michal Kowalski

Cho Huak Teh

Jianxin Zhang

Jonathan Oakley

Dominic David

Michael Gordon Scott

Alpa Kohli

Chiuman Yeung

Various computer-implemented methods for classifying defects on a specimen are provided. One method includes assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The method also includes displaying information about the defect groups to a user. In addition, the method includes allowing the user to assign a classification to each of the defect groups. Systems configured to classify defects on a specimen are also provided. One system includes program instructions executable on a processor for assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The system also includes a user interface configured for displaying information about the defect groups to a user and allowing the user to assign a classification to each of the defect groups.

Computer-implemented methods and systems for classifying defects on a specimen

Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.

Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions

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Fremont, CA, United States of America

Lalita A Balasubramanian