Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Commissariat a L'energie Atomique Et Aux Energies

Laetitia Adelmini

Bertrand Szelag

Karim Hassan

Stephane Brision

Stéphane Brision

The invention relates to a process for fabricating a semiconductor diode () via transfer of a semiconductor stack () then local etching to form a semiconductor pad (), the production of the semiconductor pad () comprising a plurality of sequences comprising a dry etch that leaves a residual segment (), formation of a hard-mask spacer (), then a wet etch of the residual segment ().

Process for fabricating a semiconductor diode via wet and dry etches

A laser source includes a semiconductor pad containing an active waveguide arranged on a functionalized substrate having an integrated waveguide. The integrated waveguide is formed from a stack of a first portion and of a second portion. A Bragg grating is arranged in the first portion and is covered by the second portion.

Hybrid laser source comprising an integrated waveguide containing an intermediate Bragg grating

The invention relates to a method of fabrication of a photonic chipcomprising an avalanche photodiodeof the SACM type optically coupled to an integrated waveguide, comprising a step for forming a first spacerallowing a constant peripheral recessing drof the charge regionto be defined later on with respect to an edge of the multiplication portion, then a step for forming a second spacerallowing a constant peripheral recessing drof the absorption portionto be defined later on with respect to an edge of the charge region

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Grenoble, France

Laetitia Adelmini