Bede Scientific Instruments Limited

Rigaku Corporation

Medical Research Council

Rigaku Innovative Technologies Europe S.r.o.

Ladislav Pina

David Keith Bowen

Adolf Inneman

Kazuhiko Omote

Stephan Menzer

Shintaro Kobayashi

Licai Jiang

Matthew Wormington

Naohisa Osaka

Makoto Kambe

Bonglea Kim

Ulrich Wolfgang Arndt

Neil Loxley

Vaclav Jelinek

Nell Loxley

Martin Horvarth

Rene Hudec

Jiri Marsik

Petra Feichtinger

Veronika Marsikova

An X-ray diffraction apparatus having a solar slit, and a method for preventing the diffraction image on a detector from spreading in the in-plane direction even when an X-ray irradiation region spreads over the sample surface due to measurement by GIXD, thereby allowing for measurement with a short measurement time and a high resolution. The soller slitincludes a plurality of metallic thin plates, each being perpendicular to the bottom surface, which are arcuately arranged with a predetermined angular interval between each other so as to pass X-rays in a radiating direction from a particular focus, the soller slit being provided to be used at a position through which X-rays diffracted on a sample surface pass, the particular focus being the center of a goniometer circle, the X-rays being irradiated on a sample at an angle for GIXD.

Soller slit, X-ray diffraction apparatus, and method

The X-ray generating apparatusapplies an electron beam eonto a targetto generate X-rays x, and includes a permanent magnet lensconfigured to focus the electron beam e, a correction coilprovided on a side of the electron beam ewith respect to the permanent magnet lensand configured to correct a focus position formed by the permanent magnet lensin a traveling direction of the electron beam e, and a targetonto which the focused electron beam is applied. Accordingly, the apparatus configuration can be extremely compact and lightweight in comparison with general apparatuses. Furthermore, by the correction coil, the intensity of the magnetic field can be finely adjusted and the focus position in the traveling direction of the electron beam ecan be finely adjusted.

X-ray generating apparatus

A Soller slit device is provided for collimation of high energy radiation, such as X-ray or EUV radiation, and has a low angle of divergence (less than 0.1&#xb0;) and a high transmission efficiency (60 to 80% or greater). The Soller slit is made up of multiple, parallel blades of low-density material, such as glass, mica, or the like, which can be treated to reduce reflectivity. The Soller slit device of the invention advantageously provides an increased peak intensity and decreased peak width in diffraction patterns produced in high energy diffractometry applications, such as X-ray diffractometry.

Soller slit using low density materials

The invention provides a miniaturized multi-foil object for use in a laboratory environment and other practical applications that require small or portable and/or disposable high energy radiation optics. Specifically, the invention finds utility in high energy lithographic systems, such as X-ray or EUV lithography, as a condenser optic or in topographic systems. In lithographic systems, the present invention exhibits square symmetry, a relatively large aperture size, and disposability. Additionally, the multi-foil optic of the invention provides a high throughput efficiency.

Multi-foil optic

An X-ray topographic system comprises an X-ray generator producing a beam of X-rays impinging on a limited area of a sample such as a silicon wafer. A solid state detector is positioned to intercept the beam after transmission through or reflection from the sample. The detector has an array of pixels matching the beam area to produce a digital image of said limited area. Relative stepping motion between the X-ray generator and the sample produces a series of digital images which are combined together. In optional embodiments, an X-ray optic is interposed to produce a parallel beam to avoid image doubling, or the effect of image doubling is removed by software.

X-ray topographic system

This invention relates to a portable apparatus for carrying out X-ray fluorescence spectrometry on specimen materials at a distance from the apparatus. The apparatus comprises an X-ray generating tube, such as a microfocus tube, and two paraboloidal X-ray reflecting mirrors. The first collecting mirror is positioned in close coupled arrangement adjacent to the exit window of the tube, such that it emits parallel X-ray radiation to the second focusing mirror, which is aligned on the axis of and spaced apart from the first mirror ( ). The second mirror ( ) collects the parallel X-ray radiation at its end closest to the first mirror and emits X-ray radiation in a focused beam onto the specimen. The distance between the first and second mirrors is adjusted to suit the distance from the X-ray tube to the specimen. Focal spots on the specimen of diameter less than 15 microns (590.55 microinches) are possible, enabling precise analysis of small areas of the specimen.

X-ray fluorescence apparatus

An X-ray focusing apparatus comprises a waveguide ( ) closely coupled to an X-ray focusing mirror ( ). The mirror comprises an interior reflecting surface having a rotational axis of symmetry. The waveguide may comprise a tapered polycapillary lens.

X-ray focusing apparatus

Mirror support means having a metal block machined with a first pair of slots shaped to receive a first pair of curved mirrors and a second pair of slots shaped to receive a second pair of curved mirrors. The block is sufficiently resiliently deformable to enable the slots to be widened to receive the mirrors and then for the mirrors to be clamped in position, the slots being accurately machined so that the mirrors are bent into their required forms of curvature. The use of a unitary block simplifies the construction and setting up of the support means for the mirrors.

Slotted support for x-ray focusing mirrors

Growing community of inventors

Prague, Czechia

Ladislav Pina