Samsung Electronics Co., Ltd.

Ulsan National Institute of Science and Technology

Clinomics Co.

Unist, Inc.

Kyusang Lee

Jinhyuk Choi

Beomsoo Hwang

Kongwoo Lee

Myungki Song

Kyung-hee Park

Yeon-Su Lee

Jae-Heup Kim

Yoon Kyoung Cho

Keonwoo Kim

Tae-Jin Ahn

Taeyong Kim

Anirban Bhaduri

Ki-eun Kim

Saswati Dana

Jung-joo Hwang

Yeon-a Park

Ok-kyoung Son

Tae-Hyeong Kim

Ji-Young Cho

Jonghwi Seo

Varun Giri

Duckjin Kim

Venkata Tadi Siva Kumar

Ok-ryul Song

Heechul Park

Yongjin Lee

Seojoo Choi

Hyunjoo Jeon

Hyunwoong Choi

A semiconductor processing device includes a stage configured to receive a bare wafer placed thereon, a laser sensor located above the stage in a vertical direction, orthogonal to an upper surface of the bare wafer, a camera sensor located above the stage in a first direction, a lighting device radiating an imaging region imaged by camera sensor with light, and a controller, configured to rotate the bare wafer using the stage, obtain a plurality of sub-images of the bare wafer captured by the camera sensor to generate an original image of the bare ware, and detect a first defect of the bare wafer using the original image, wherein the controller is configured to detect a second defect of the bare wafer by measuring a distance between the laser sensor and the bare wafer, while rotating the bare wafer using the stage.

Semiconductor processing device and semiconductor processing system

A semiconductor substrate processing apparatus includes a substrate transfer module including a chamber having an internal space extending in a first direction within the chamber, at least one pair of first load ports at opposite sides of the chamber, to face in a second direction intersecting the first direction, and configured to rotate and move a substrate carrier, a load lock at a rear surface of the chamber, and a robot arm configured to move in the first direction in the internal space of the chamber, a transfer chamber connected to the load lock of the substrate transfer module, a plurality of processing chambers connected to the transfer chamber, and a transfer arm inside the transfer chamber, and configured to unload the semiconductor substrate from the load lock and to load the semiconductor substrate into at least one of the plurality of processing chambers.

Semiconductor substrate processing apparatus

A wafer transfer apparatus includes a controller, a wafer transfer robot including a hand unit configured to hold a wafer, a driving unit connected to the hand unit and configured to move the wafer, and a sensor unit provided on the driving unit, and a plurality of transfer structures configured to exchange the wafer with the wafer transfer robot, each of the plurality of transfer structures including a plurality of markers recognizable by the sensor unit, where the sensor unit includes a camera sensor recognizing the plurality of markers and a laser sensor configured to measure distances to the plurality of markers by emitting a laser to the plurality of markers and receiving the laser reflected from the plurality of markers.

Wafer transfer apparatus with aligner

A wafer processing apparatus may include a plurality of equipment front end modules (EFEMs), a wafer transfer chamber, a wafer processing chamber, and a wafer transfer arm. Each of the plurality of EFEMs may include an EFEM chamber, a plurality of load ports provided at a side of the EFEM chamber, and a load lock provided at a side of the EFEM chamber to overlap with at least one of the plurality of load ports in a vertical direction.

Wafer processing apparatus including EFEM and method of processing wafer

The present invention may provide a microfluidic device including a rotatable body; a first chamber positioned in a direction of an inner wall of the body; a second chamber positioned in a direction of an outer wall of the body from the first chamber; and a backflow prevention unit, and wherein a fluid is transferred from the first chamber to the second chamber, and wherein the backflow prevention unit prevents a backflow of the fluid from the second chamber to the first chamber.

Microfluidic device

Provided is a microfluidic device to more easily and effectively operate a valve by improving the structure of valves for controlling a fluid flow more simply and efficiently, which comprises a platform having at least one chamber, at least one flow channel connected to the chambers and transfer fluid, and a valve which opens or closes the flow channel, wherein the valve comprises a body installed in the platform, a blocking plate installed in the body and positioned to face the flow channel to selectively blocks the flow channel, a pressing rod installed to be movable at the inside of the body to press the blocking plate, and a fixing unit installed at the body and fix the pressing rod at a blocking plate pressing position.

Microfluidic device and control equipment for microfluidic device

Provided are a method and apparatus for designing and processing a rule pipeline for in silico prediction of chemical reactions. The method includes designing a rule pipeline from at least one rule for chemical conversion and processing at least one input molecule by using the designed rule pipeline to predict a chemical reaction based on a processing result of the processing.

Methods and apparatus for in silico prediction of chemical reactions

Provided are a method and apparatus for analyzing genotype data plotted in a two-dimensional space. The method includes: connecting points representing the genotype data to a predetermined point to form straight lines and obtaining angles between adjacent straight lines; extracting the two largest angles from the obtained angles; and analyzing the plotted genotype data using three groups of the genotype data separated by the two extracted largest angles. According to the present invention, when the experimental results of classifying genotype are to be analyzed, the two largest angles from the angles obtained by connecting straight lines between points representing each of the genotype data and a predetermined point plotted in a two-dimensional space are detected, and three data regions separated by the detected two largest angles are used to analyze the genotype data. Thus, a large amount of the experimental data for classifying the genotype can be analyzed rapidly and conveniently.

Method and apparatus for analyzing genotype data

Provided is a polynucleotide for diagnosis or treatment of breast cancer, including at least 10 contiguous nucleotides of a nucleotide sequence selected from the group consisting of nucleotide sequences of SEQ ID No: 1 to SEQ ID No: 5 and comprising a nucleotide at 101position of the nucleotide sequence, or a complementary polynucleotide thereof.

Polynucleotide associated with breast cancer comprising single nucleotide polymorphism, microarray and diagnostic kit comprising the same and method for diagnosing breast cancer using the same

Growing community of inventors

Ulsan, South Korea

Kyusang Lee