Samsung Display Co., Ltd.

Kyungjoo Min

Sukwon Jung

Jaihyuk Choi

Hyunwoo Joo

Jong-hoon Park

Wonwoong Park

Myungsoo Huh

Jong-Hoon Park

A chemical vapor deposition apparatus includes a chamber, a susceptor supporting a substrate, a backing plate to which power is applied, a diffuser providing a deposition gas, and a first insulator. The first insulator may include a first portion covering a top surface of the backing plate, and a second portion assembled with the first portion and covering a sidewall of the backing plate.

Chemical vapor deposition apparatus and method of manufacturing display apparatus using the same

A chemical vapor deposition (CVD) system may include a chamber, a susceptor provided in the chamber to support a substrate, a gas distribution part provided over the susceptor, a first ground strap bar provided on a bottom inner surface of the chamber and electrically connected to the chamber, a second ground strap bar provided on a bottom surface of the susceptor and electrically connected to the susceptor, and a plurality of ground straps electrically connected to the first and second ground strap bars, each of the plurality of ground straps including two opposite portions that are fastened to the first and second ground strap bars, respectively.

Chemical vapor deposition system including ground strap bar

Growing community of inventors

Yongin-si, South Korea

Kyungjoo Min