Samsung Electronics Co., Ltd.

Kyunghun Han

Taehyun Kim

Youngjoo Lee

Jungchul Lee

Ingi Kim

Seulgi Lee

Sangwoo Bae

Minhwan Seo

Myeongock Ko

A wafer inspection apparatus includes: an objective lens on an optical path of first and second input beams; and an image sensor configured to generate an image of the wafer based on scattered light according to a nonlinear optical phenomenon based on the first and second input beams, wherein the first input beam passing through the objective lens is obliquely incident on the wafer at a first incident angle with respect to a vertical line that is normal to an upper surface of the wafer, the second input beam passing through the objective lens is incident on the wafer at a second incident angle oblique to the vertical line that is normal to the upper surface of the wafer, and the first and second incident angles are different from each other.

Wafer inspection apparatus and system including the same

Growing community of inventors

Hwaseong-si, South Korea

Kyunghun Han