Samsung Electronics Co., Ltd.

Kyungho Jang

Nam-Gun Kim

Eun-Ok Lee

Hyun-jung Lee

Gyuhwan Oh

Heesook Park

A spacer covering a sidewall of a contact plug includes a relatively more damaged first portion and a relatively less damaged second portion. An interface of the first and second portions of the spacer is spaced apart from a metal silicide layer of the contact plug. Thus reliability of the semiconductor device may be improved. Related fabrication methods are also described.

Semiconductor devices including spacers

Methods of manufacturing semiconductor devices including air gap spacers

Semiconductor devices including air gap spacers

Methods for forming a semiconductor device including fine patterns are provided. The method may include forming a mask layer including first holes spaced apart from each other in a first direction and a second direction. The method may also include forming local mask patterns on the mask layer and forming a sacrificial layer on the mask layer filling the first holes and surrounding the local mask patterns. The local mask patterns may be offset from the first holes in the first direction and the second direction. The method may further include removing the local mask patterns to form openings in the sacrificial layer exposing the mask layer and etching the mask layer through the opening to form second holes in the mask layer.

Methods for forming a semiconductor device including fine patterns

Growing community of inventors

Hwasung-si, South Korea

Kyungho Jang