Samsung Display Co., Ltd.

Wonik Ips Co., Ltd.

Sk Planet Co., Ltd.

Amazon Technologies, Inc.

Yonsei University

Ulsan College Industry Cooperation

Lg Display Co., Ltd.

Kyung Tea Park

Il Nam Kim

Keum Dong Jung

Won Sang Park

Kang Bin Jo

Jong Hyun Lee

Go Eun Cha

Byung Han Yoo

Ji Woong Kim

Sang Hyun Heo

Dae Seong Lee

Young Chan Kim

Byeong Hee Won

Jong In Baek

Ki Seo Kim

Hyung Gun Ma

Won Jun Jang

Sung Jin Kim

Jin Oh Kwag

Sung Chan Jo

Jae Kyoung Kim

Hyun Dae Lee

Seong Joo Lee

Yong-Suk Yeo

Jongkwan Park

Hyeon Beom Gwon

Kyoungchan Sohn

Joo Suop Kim

Chang Hun Kim

Ah Young Hwang

Tae Hee Lee

Hyung Jun Kim

Yun Ho Kim

Jun Ho Song

Jae-Kyoung Kim

Cheol Kyu Kim

Suk-Won Jung

Do Young Kim

Oh Jo Kwon

Sang Youn Han

Suk Won Jung

Sung Hoon Yang

Seung Hyun Moon

Seung Mi Seo

Dong Wook Yang

Moon Jae Jeong

Jonguk Bae

Juheyuck Baeck

Young Jun Kim

Tae Hun Lee

Jin Seo Kim

Seong An Park

Jangyeon Kwon

Sang Rok Nam

Hae Jin Ahn

Won Sik Ahn

Sun Jo Kim

The present invention relates to an internal chamber processing method, and more particularly, to an internal chamber processing method for performing processing on a chamber and a component inside the chamber. Disclosed is an internal chamber processing method for processing the inside of a chamber in which substrate processing is performed, the method including a pressurizing operation (S) of raising a pressure inside a chamber to a first pressure (P) higher than the atmospheric pressure by using a pressurized gas and a depressurizing operation of lowering the pressure inside the chamber from the first pressure (P) to a second pressure (P) after the pressurizing operation (S). The pressurizing operation (S) and the depressurizing operation (S) are performed in a state in which a substrate to be processed is removed from the inside of the chamber.

Internal chamber processing method and substrate processing method

A sensor device includes first sensors; second sensors and the first sensors of mutual capacitance; a sensor transmitter electrically connected to the first sensors, the sensor transmitter supplying driving signals to the first sensors; a sensor receiver electrically connected to the second sensors, the sensor receiver receiving sensing signals from the second sensors, the sensor receiver demodulating the sensing signals by using demodulation clock signals; and a signal generator generating a basic clock signal, and generating the driving signals and the demodulation clock signals to be synchronized with the basic clock signal.

Sensor device and display device comprising the same

A display device includes a display panel having a plurality of pixels connected to gate lines and data lines, and a plurality of fingerprint sensors connected to sensing lines and read-out lines. A gate driver provides gate signals to the gate lines and provides sensing signals to the sensing lines. The gate driver includes a first gate signal supply module providing a first gate signal to a first gate line among the gate lines. A first switching element is turned on by a reset enable signal to connect the first gate line and a first sensing line among the sensing lines.

Display device

A method of compensating for stains caused by deterioration of a display device, the display device including an illuminance sensor and a display panel including pixels and an optical fingerprint sensor, the method including determining, while in a test mode of the display device and via the illuminance sensor, whether an illuminance is a reference value or less, emitting, while in the test mode of the display device, first color light from the display panel when the illuminance is the reference value or less, and acquiring, while in the test mode of the display device, afterimage compensation data relating to amounts of deterioration of the pixels by receiving the first color light through an optical fingerprint sensor.

Device and method for compensating for stains caused by deterioration of a display device

The present disclosure relates to a substrate processing method, and more particularly, to a substrate processing method for improving the physical properties of a thin film formed on a substrate. An embodiment of a substrate processing method according to the present disclosure comprises the steps of: carrying a substrate into a first chamber; a first pressurizing step increasing the pressure in the first chamber so that the pressure in the first chamber reaches a first high-pressure that is higher than the normal pressure; a first depressurizing step decreasing the pressure in the first chamber so that the pressure in the first chamber reaches a second high-pressure that is lower than the first high-pressure and equal to or higher than the normal pressure; a first pressurizing/depressurizing repeating step performing the first pressurizing step and the first depressurizing step repeatedly at a predetermined number of times; and a second depressurizing step decreasing the pressure in the first chamber so that the pressure in the first chamber reaches a first low-pressure that is lower than the normal pressure.

Method of processing substrate

Disclosed is a substrate processing method including: a pressurizing operation of raising a process pressure from a first pressure (P) to a second pressure (P) that is greater than the atmospheric pressure; a depressurizing operation of lowering the process pressure from a sixth pressure (P), which is greater than the atmospheric pressure, to a seventh pressure (P); and an annealing operation of changing the process pressure into a preset pressure change pattern between the pressurizing operation and the depressurizing operation, under a temperature atmosphere of a second temperature (T) higher than the room temperature. A temperature raising operation of raising a temperature atmosphere from a first temperature (T) to the second temperature (T) is performed from a preset temperature raising start point (t) to a preset temperature raising end point (t) while the pressurizing operation is performed or after the pressurizing operation is performed.

Substrate processing method

An input sensing device includes sensor pixels initialized in response to a reset signal provided through a reset line, and output a sensing signal to a read-out line in response to a scan signal provided through a scan line. A controller generates at least one start signal and clock signals. A selector selectively provides the at least one start signal and the clock signals to first control lines or second control lines. A reset driver connected to the first control lines, and supplying reset signals to at least some of the reset lines based on the at least one start signal and the clock signals provided through the first control lines. A scan driver is connected to the second control lines, and supplies scan signals to at least some of the scan lines based on the at least one start signal and the clock signals.

Input sensing device and display device including the same

The present invention disclosed herein relates to a substrate processing method, and more particularly, to: a substrate processing method in which a flow rate of a process gas in a depressurizing operation is regulated in a pressure changing process for improving properties of a thin film; a substrate processing apparatus using the substrate processing method; and a semiconductor manufacturing method.

Substrate processing method, substrate processing apparatus using the same, and semiconductor device manufacturing method

An input sensing unit includes a touch sensing unit, which includes a plurality of driving electrodes, a plurality of sensing electrodes, and a driving signal generating unit which provides driving signals to the driving electrodes. The sensing electrodes are insulated from and intersect the driving electrodes. The driving signal generating unit includes touch drivers connected to driving electrodes and a digital-to-analog converter configured to provide a first signal or a second signal, and each of the touch drivers is connected to a preset number of driving electrodes among the driving electrodes.

Input sensing unit and method of driving the same

A display device includes a display panel including a pinhole optical system and an optical sensor overlapping the pinhole optical system. A fingerprint detection method which detects a user's fingerprint using the display device includes obtaining fingerprint sensing data by sensing a user's fingerprint using the display device, detecting misalignment information indicating a degree of misalignment between the pinhole optical system and the optical sensor, generating calibration data using at least one piece of reference data corresponding to at least one reference folding angle according to the detected misalignment information, generating fingerprint data by correcting the fingerprint sensing data using the calibration data, and detecting the user's fingerprint according to the fingerprint data.

Display device and fingerprint detection method using the same

A sensor device of the present invention includes first sensors; second sensors forming capacitance with the first sensors; a multi-frequency generator generating a first frequency signal and a second frequency signal having different frequencies; a sensor transmitter supplying first driving signals based on the first frequency signal to first sensors of a first group among the first sensors, supplying second driving signals based on the second frequency signal to first sensors of a second group among the first sensors, and simultaneously supplying the first driving signals and the second driving signals; and a sensor receiver simultaneously receiving sensing signals from the second sensors.

Sensor device and driving method thereof using multi-frequency transmission

An input sensing device includes: sensor pixels, a horizontal driver, a selection circuit, and a vertical driver. Each of the sensor pixels is connected to a plurality of driving lines and a one of a plurality of signal input lines. The horizontal driver sequentially applies a horizontal driving signal to the sensor pixels through the driving lines. The selection circuit is connected to n of the signal input lines (n is a natural number of 2 or more) and to one output line. The selection circuit sequentially outputs n sensing signals received through the n signal input lines to the one output line. The vertical driver receives the n sensing signals through the one output line. The horizontal driver applies the horizontal driving signal n times to a given one of the driving lines to correspond to the n sensing signals.

Input sensing method and input sensing device including the same

A display device includes a display panel including a plurality of touch electrodes, a touch driving circuit electrically connected to the plurality of touch electrodes, and a fingerprint sensor device disposed on one surface of the display panel and including a plurality of unit blocks. The fingerprint sensor device includes a plurality of fingerprint scan lines extending in a first direction, a plurality of fingerprint sensing lines extending in a second direction crossing the first direction, a plurality of sensor pixels respectively connected to the plurality of fingerprint scan lines and the plurality of fingerprint sensing lines, and a fingerprint scan driver having a plurality of stages for applying a fingerprint scan signal to each of the plurality of fingerprint scan lines. The touch driving circuit applies a start signal to the fingerprint scan driver.

Fingerprint sensor device, display device including the same, and method for driving the display device

The present invention relates to a substrate processing method, and more particularly, to a processing method for substrate for removing impurities from inside a thin film of a substrate and improving characteristics of the thin film.

Processing method for substrate

An analog front-end includes a (1-1)-th charge amplifier configured to differentially amplify a first and second sensing signals provided to a (1-1)-th input terminal and a (1-2)-th input terminal, respectively, and output a (1-1)-th differential signal. A (1-2)-th charge amplifier is configured to differentially amplify the second sensing signal and a third sensing signal provided to a (1-3)-th input terminal and a (1-4)-th input terminal, respectively, and output a (1-2)-th differential signal. A second charge amplifier is configured to differentially amplify the (1-1)-th differential signal and the (1-2)-th differential signal provided to a (2-1)-th input terminal and a (2-2)-th input terminal, respectively, and output a (2-1)-th differential signal and a (2-2)-th differential signal. A demodulation circuit is configured to filter the (2-1)-th differential signal and the (2-2)-th differential signal and output demodulated differential signals. An analog-to-digital converter is configured to output a sensing value based on the demodulated differential signals.

Input sensing device having an analog front-end

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Yongin-si, South Korea

Kyung Tea Park