Semes Co., Ltd.

Cap Corporation

Other

Kyung Min Kim

In Hwang Park

Kyoung Joon Song

Joo Jib Park

Kuk Saeng Kim

Tae Hun Kim

Jae Woong Kim

Shi Hyun Park

Seung Eun Na

Tae Hwa Lee

Byung Wook Yun

Eun Woo Jang

Je Myung Cha

Sung Pil Kim

Ji Hyeong Lee

Hyun Jin Yang

According to an embodiment of the present invention, there are provided an exhaust assembly capable of uniformly forming an air flow in an exhaust step of discharging a gas to the outside, and a liquid processing apparatus and substrate processing equipment including the exhaust assembly. According to the present invention, the exhaust assembly that discharges a gas generated in a substrate processing process includes at least two or more intake ports into which the gas flows, a body portion that communicates with the intake ports and provides symmetrical paths for discharging the gas, a guide portion that is installed to guide a flow of the gas at the body portion, and an exhaust port from which the gas is discharged. The guide portion includes a flow guide that is installed to be adjacent to at least one of the intake ports and guides a direction of the gas to equally divide the flow of the gas, and a flow-rate guide that is installed around the intake port most adjacent to the exhaust port among the intake ports and is formed to reduce a cross-sectional area of a flow path of the gas.

Exhaust assembly, and liquid processing apparatus and substrate processing equipment including the same

The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having an inner space therein; a treating container disposed within the inner space and having a treating space; a substrate support unit supporting a substrate in the treating space; a liquid supply unit supplying a liquid to the substrate supported by the substrate support unit; an exhaust unit exhausting a fume generated in the treating space; an airflow supply unit coupled to a top side of the housing and supplying a gas to form a downward airflow to the inner space; and a perforated plate disposed between the treating container and the airflow supply unit and discharging the gas to the inner space, and wherein the perforated plate comprises: a bottom portion and a side portion, the side portion comprising a first side portion, and the first side portion extending and upwardly inclining from the bottom portion to a first sidewall of the housing, and having a first hole for discharging the gas.

Apparatus for treating substrate

A substrate processing apparatus includes a rotation unit supporting and rotating a substrate, a chemical ejection unit ejecting a chemical fluid toward the rotation unit, a chemical recovery unit disposed close to the rotation unit and collecting a chemical fluid scattered from the rotation unit, a first lifting unit coupled to the chemical recovery unit and moving upward and downward the chemical recovery unit relative to the rotation unit, and a first position correction member allowing the chemical recovery unit to be elastically supported by the first lifting unit and changing a relative position of the chemical recovery unit with respect to the lifting unit.

Substrate treatment apparatus containing elastic support members attached to chemical recovery unit

The present invention relates to a method for isolating flavonoids such as cochlioquinone or chrysoeriol from a rice plant inoculated with a whitebacked planthopper. The method of the present invention, for example, facilitates not only the fast production of flavonoids such as cochlioquinone or chrysoeriol but also the mass-production of flavonoids such as cochlioquinone or chrysoeriol with high efficiency in addition to the advantage of saving costs. Therefore the method of the present invention can be effectively used for the production of flavonoids such as cochlioquinone or chrysoeriol and also be used in various fields using the same.

Method for isolating flavonoids from rice plant inoculated with whitebacked planthopper

The present invention relates to a control method of a broadcasting receiver and a broadcasting receiver adapting the control method. More specifically, the present invention relates to a control method of a broadcasting receiver capable of switching off a power key in a state of display means standing by and switching on the power key in case that a power-key-on is inputted, to improve user convenience.

Method of controlling a broadcasting receiver and broadcasting receiver enabling the method

Windscreen wiper

A wiper device for vehicles is disclosed. The wiper device () for vehicles according to the present invention provides compatible standardized parts, such that the wiper device can be applied to various kinds of drive arms having different shapes and sizes. Therefore, the degree of freedom in design for the standardization of products can be increased, thus markedly reducing the production costs. Furthermore, thanks to the standardization of products, the present invention can be easily adapted for mass production. Hence, there are industrial effects in that products can be economically produced, distributed and spread.

Automobile wiper-blade

Growing community of inventors

Daegu, South Korea

Kyung Min Kim