Cheil Industries Inc.

Kyung Hee Hyung

Dong Seon Uh

Jin Kuk Lee

Chang Il Oh

Kyong Ho Yoon

Min Soo Kim

Jong Seob Kim

Irina Nam

Hwan Sung Cheon

Jong-Seob Kim

Nataliya Tokareva

An aromatic ring-containing polymer, a polymer mixture, an antireflective hardmask composition, and a method for patterning a material on a substrate, the aromatic ring-containing polymer including at least one aromatic ring-containing polymer represented by Formulae 1, 2, or 3.

Aromatic ring-containing polymer, polymer mixture, antireflective hardmask composition, and associated methods

An antireflective hardmask composition includes an organic solvent, an initiator, and at least one polymer represented by Formulae A, B, or C as set forth in the specification.

Polymer having antireflective properties and high carbon content, hardmask composition including the same, and process for forming a patterned material layer

A naphthalene-backbone polymer represented by Formula 1: wherein n and m are independently at least 1 and less than about 190, Ris a hydrogen, a hydroxyl, a hydrocarbon group of about 10 carbons or less, or a halogen, Ris methylene or includes an aryl linking group, Ris a conjugated diene group, and Ris an unsaturated dienophile group.

Polymer having antireflective properties, hardmask composition including the same, and process for forming a patterned material layer

An antireflective hardmask composition includes an organic solvent, and at least one polymer represented by Formulae A, B or C: In Formulae A and B, the fluorene group is unsubstituted or substituted, in Formula C, the naphthalene group is unsubstituted or substituted, n is at least 1 and is less than about 750, m is at least 1, and m+n is less than about 750, G is an aromatic ring-containing group having an alkoxy group, and Ris methylene or includes a non-fluorene-containing aryl linking group.

Polymer having antireflective properties, hardmask composition including the same, process for forming a patterned material layer, and associated device

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Seongnam-si, South Korea

Kyung Hee Hyung