Massachusetts Institute of Technology

Kyung-Han Hong

Franz Xaver Kaertner

Tso Yee Fan

Jeffrey Moses

Edilson L Falcao-Filho

Luis E Zapata

Eduardo Granados Mateo

Chien-Jen Lai

Aleem M Siddiqui

An inventive composite optical gain medium capable includes a thin-disk gain layer bonded to an index-matched cap. The gain medium's surface is shaped like a paraboloid frustum or other truncated surface of revolution. The gain medium may be cryogenically cooled and optically pumped to provide optical gain for a pulsed laser beam. Photons emitted spontaneously in the gain layer reflect off or refract through the curved surface and out of the gain medium, reducing amplified spontaneous emission (ASE). This reduces limits on stored energy and gain imposed by ASE, enabling higher average powers (e.g., 100-10,000 Watts). Operating at cryogenic temperatures reduces thermal distortion caused by thermo-mechanical surface deformations and thermo-optic index variations in the gain medium. This facilitates the use of the gain medium in an image-relayed, multi-pass architecture for smoothed extraction and further increases in peak pulse energy (e.g., to 1-100 Joules).

Methods, systems, and apparatus for high energy optical-pulse amplification at high average power

Extreme ultraviolet radiation is generated based on high-order harmonic generation. First, a driver pulse is generated from a drive laser. Second, the infrared driver pulse is passed through a second harmonic generator with an output wavelength in the range from 400 to 700 nm. Third, the pulse is then passed through a gas medium, which can be inside a resonant cavity, to generate a high-order harmonic in the form of extreme ultraviolet radiation.

Efficient high-harmonic-generation-based EUV source driven by short wavelength light

Seed light pulses and pump light pulses are generated; the seed light pulses are preferably chirped; and both are directed into an enhancement cavity at a full repetition rate. The enhancement cavity defines a closed optical path that contains a nonlinear medium that provides phase matching at a wavelength different from both the central seed wavelength and the central pump wavelength. The generation of the pump light pulses and the seed light pulses are synchronized to pass the seed light pulses through the nonlinear medium simultaneously with the pump light pulses to parametrically amplify the seed light pulses in the nonlinear medium to produce an amplified signal pulse and idler pulse. Increased conversion with low average pump power can be achieved, as well as gain bandwidth enhancement approaching octave-spanning levels. Additionally, in the case of chirped pump pulses with sufficient bandwidth, optimal output coupling can be designed to achieve the best impedance matching at each temporal coordinate and attain the highest possible conversion and bandwidth.

Cavity-enhanced parametric amplification at full repetition rate

Growing community of inventors

Lexington, MA, United States of America

Kyung-Han Hong