Samsung Electronics Co., Ltd.

Kyu-Sun Moon

Byung-Hoo Jung

A method for fabricating a thin film transistor includes the steps of calculating a scan pitch of a laser beam such that an unevenly crystallized area and an evenly crystallized area of a crystallized polycrystalline silicon layer are alternately arranged at a regular interval, crystallizing an amorphous silicon layer to a polycrystalline silicon layer by scanning the laser beam according to the scan pitch, calculating a spacing pitch of active patterns from the scan pitch of the laser beam, and forming the active patterns in a selected portion of the polycrystalline silicon layer according to the spacing pitch.

Growing community of inventors

Suwon, South Korea

Kyu-Sun Moon