Plasmart Inc.

Kyu-Hun Lee

Jae-Hyun Kim

Sae-Hoon Uhm

Young-Rok Kim

Sang-Won Lee

Yong-Gwan Lee

Jin-Joong Kim

Provided are a plasma generation apparatus and a plasma generation method. The plasma generation apparatus includes a chamber including a dielectric window and a toroidal discharge space, a magnetic core disposed to surround a portion of the chamber, an induction coil disposed to wind the magnetic core, and a waveguide radiating a microwave through the dielectric window. Alternating current flowing in the induction coil forms a magnetic flux at the magnetic core, and the magnetic flux generates inductively-coupled plasma. A microwave propagating along the waveguide generates microwave plasma inside the chamber.

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Daejeon, South Korea

Kyu-Hun Lee