Daewoo Electronics Co., Ltd.

M2n Inc.

Kyu-Ho Hwang

Yoon-Joon Choi

There is provided a micro piezoelectric actuator, an optical switching device including the micro piezoelectric actuator and a method for fabricating the same. The optical switching device includes a mirror, a first actuator for adjusting the tilt angle of the mirror on the X axis, a second actuator for adjusting the tilt angles of the mirror and the first actuator on the Y axis and a driving substrate for applying a driving signal to the first and second actuators. Each of the actuators has membranes, a piezoelectric device formed on each of the membranes and a connecting part having two elastic bodies coupled to the membranes and a connecting member coupled between the two elastic bodies. In this way, the optical switching device can tilt the mirror on the X axis independently from the tilting thereof on the Y axis.

Micro piezoelectric actuator and method for fabricating same

A method for manufacturing a thin film AMA is disclosed. The second sacrificial layer is formed by using amorphous silicon, poly silicon or a material having fluidity and the first sacrificial layer is formed by using amorphous silicon or poly silicon. The light efficiency is enhanced by the reflecting member having an even surface after the first and the second sacrificial layers are formed in order to have even surfaces. In addition, the active matrix, the active layer and the reflecting member have no damages because the second sacrificial layer is removed by using the oxygen plasma or the vapor of bromine fluoride or xenon fluoride and the first sacrificial layer is removed by using the vapor of bromine fluoride or xenon fluoride.

Method for manufacturing thin film actuated mirror array in an optical projection system

Thin film AMA and method for manufacturing the thin film AMA are disclosed. The thin film AMA has an active matrix, a supporting member, actuating parts, a reflecting member, and a flatness enhancing member. The flatness enhancing member such as the stress balancing layer or the stiffening member is formed beneath the reflecting member in order to enhance the flatness of the reflecting member without a bending of the reflecting member. Therefore, the reflecting member can have the level surface by the flatness enhancing member though the deformation stress such as residual stress is generated in the reflecting member during forming the reflecting member, so the light efficiency is enhanced and the quality of the picture projected onto the screen is increased.

Thin film actuated mirror array and method for manufacturing the same

Thin film AMA is disclosed. The thin film AMA has an active matrix, a supporting member, actuating parts and a reflecting member. The supporting member has a supporting line, a rectangular ring-shaped supporting layer, anchors. Insulating members are formed from top electrodes to the supporting layer. The anchors supporting the actuating parts are formed perpendicular to the actuating parts. The initial tiltings of the actuating parts are prevented because the stress concentration line doesn't generated. Therefore, the desired reflection angle of the reflecting member may be regular, so the light efficiency is enhanced and the quality of the picture projected onto the screen is increased. Also, the electrical shorts generated between the top electrodes and the bottom electrodes may be prevented by the insulating members, so point defects of pixels are effectively decreased.

Thin film actuated mirror array in an optical projection system

Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring and a connecting terminal, an actuator formed on the substrate, and a supporting element for supporting the actuator and for preventing an initial deflection of the actuator. The actuator has a bottom electrode, an active layer, a top electrode. The supporting element has a supporting layer attached beneath the bottom electrode for supporting the actuator, a supporting member for supporting the actuator, the supporting member being formed between the substrate where the connecting terminal is formed and a bottom of a first portion of the supporting layer, and a secondary supporting member for preventing an initial deflection of the actuator, the secondary supporting member being formed between the substrate and a bottom of a second portion of the supporting layer. According to the present invention, the initial deflection of the actuator can be made uniform and a contrast of a picture projected onto a screen can be increased by reinforcing the secondary supporting member between the substrate and the supporting layer so as to reduce uneven residual stresses and stress gradients of an actuator.

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Seoul, South Korea

Kyu-Ho Hwang