Samsung Electronics Co., Ltd.

Samsung Electro-mechanics Co., Ltd.

Korea Advanced Institute of Science and Technology

Kyu-Dong Jung

Woon-bae Kim

Min-seog Choi

Eun-sung Lee

Seung-wan Lee

Jong-hyeon Chang

Moon-chul Lee

Jong-oh Kwon

In-sang Song

Jun-sik Hwang

Che-Heung Kim

Kae-dong Back

Jeong-yub Lee

Seung-Tae Choi

Seok-Whan Chung

Seok-Jin Kang

Qian Wang

Ki-Hun Jeong

Jung-Hwan Kim

Tae-Je Cho

Chang-seung Lee

Yong-sung Kim

Chang-youl Moon

Seog-woo Hong

Eun-Sung Lee

Chul-soo Kim

Jong-Seok Kim

Duck-hwan Kim

Byung-gil Jeong

Yoon-chul Son

Kwang-Chul Choi

Jung-ho Kang

Sang-Chul Sul

Jea-Shik Shin

Suk-jin Ham

Seung-Wan Lee

Chan-Bong Jun

Dong-Gil Lee

Seog-soo Hong

Ci-moo Shong

Dong-Min Keum

Woon-Bae Kim

Min-Seog Choi

Jong-Hyeon Chang

Jeong-Yub Lee

Provided are an initiator and a method for debonding a wafer supporting system. The initiator for debonding a wafer supporting system includes a rotation chuck having an upper surface on which a wafer supporting system (WSS), which includes a carrier wafer, a device wafer, and a glue layer for bonding the carrier wafer and the device wafer to each other, is seated to rotate the wafer supporting system, a detecting module detecting a height and a thickness of the glue layer and a laser module generating a fracture portion on the glue layer through irradiating a side surface of the glue layer with a laser on the basis of the height and the thickness of the glue layer.

Initiator and method for debonding wafer supporting system

The variable liquid device includes: a chamber including a channel, in which a fluid flows, having an inconsistent height in at least a part of the channel; a first fluid filled in the chamber and formed of a non-transmissive material; and a second fluid filled in the chamber and formed of a light transmittable material that does not mix with the first fluid, wherein an aperture, through which light is transmitted, is adjusted according to a variation of an interface between the first fluid and the second fluid.

Variable liquid device having uneven channel and apparatus including the same

Exemplary embodiments disclose an optical zoom probe including an aperture adjuster configured to adjust an aperture in which light transmitted by a light transmitter passes, a focus adjuster configured to focus the light passed through the aperture and adjust a focal length to an ultra-close location and a close location, and a filter which includes a center region in which incident light passes without change, and a filter region which surrounds the center region and increases a depth of focus (DOF) of light that is focused on the ultra-close location.

Optical zoom probe

An aperture adjusting apparatus is provided. The aperture adjusting apparatus includes: a variable part of which an aperture size varies; an optical sensor configured to sense light incident to the variable device part and light output from the variable device part; an aperture calculator configured to calculate a size of an aperture formed in the variable part from light intensity sensed by the optical sensor; and a driving controller configured to control driving of the variable device part by receiving a calculation result fed back from the aperture calculator.

Method and apparatus for adjusting an aperture in an optical system

A microfluidic device and a method of controlling a fluid included in the microfluidic device. The microfluidic device includes: a chamber; a first fluid that is disposed in the chamber and in which a hygroscopic material is dissolved; a second fluid that is disposed in the chamber and is immiscible with the first fluid; and an electrode portion provide in the chamber and is configured to form an electrical field in the chamber when a voltage is applied to the electrode portion, wherein an interface between the first and second fluids is varied according to the electrical field.

Microfluidic device and method of controlling fluid in the same

An optical zoom probe is provided. The optical zoom probe includes: an aperture adjuster which adjusts an aperture through which light which is transmitted by a light transmitter propagates; and a focus adjuster which focuses light that propagates through the aperture and which includes first and second liquid lenses for each of which respective curvatures are independently controlled so as to adjust a respective focal length.

An optical apparatus such as a varifocal fluidic lens is provided. Optical apparatus includes a spacer frame, optical fluid, an elastic membrane, an actuator, an actuator frame, and a thermally deformable frame. Spacer frame defines an internal space including a lens portion and a driving portion that connect to each other, and the driving portion is disposed to surround the lens portion disposed in the center area of the internal space. Optical fluid is filled in the internal space defined by the spacer frame. The elastic membrane is attached on a surface of the spacer frame, to cover a side of the internal space, and the thermally deformable plate is attached on the other surface of the spacer frame, to cover the other side of the internal space. The thermally deformable plate deforms to increase or decrease a volume of the internal space according to a change in temperature.

Optical apparatus

Provided is an aperture adjusting apparatus for adjusting an aperture through which light transmits. The aperture adjusting apparatus includes: a chamber configured to have space in which fluid flows, the chamber including a lower channel, an upper channel, and a plurality of reservoir regions connecting the lower channel and the upper channel and each having a non-uniform width crossing a flow direction of a fluid to form a space in which fluid flows; a photo-interceptive first fluid and a photo-transmissive second fluid having a property that the photo-transmissive second fluid does not mix with the first fluid and that are prepared in the chamber; and a first electrode unit in which one or more electrodes to which a voltage is applied are arrayed to form an electric field in the chamber, wherein an aperture through which light transmits is adjusted by a location change of an interface between the first fluid and the second fluid according to the electric field.

Apparatus for adjusting aperture using microelectrofluidic method

A microelectrofluidic device includes: a chamber; a first fluid and a second fluid which are contained in the chamber and are not mixable with each other; and a first electrode group including a plurality of electrodes that are disposed on an inner side of the chamber, and to which a voltage is applied to change an interface between the first fluid and the second fluid, wherein the plurality of electrodes are connected to form a first electrode unit, a second electrode unit, and a third electrode unit that are independently turned on or off, and the plurality of electrodes are annular and coated with an insulating material, and adjacent electrodes are connected to different electrode units.

Microelectrofluidic device and method of driving the same

A vari-focal fluidic lens is provided. The fluidic lens includes a frame, an first membrane, a second membrane, and an optical fluid. The frame defines an inner space of the fluidic lens including a driving portion and a lens portion that are connected to each other. The elastic membrane is attached to one side of the frame to cover at least the lens portion. The second membrane is attached to an opposite side of the frame to cover at least the driving portion and is deformable in response to temperature change to vary a volume of the inner space. Optical fluid is contained in the inner space.

Fluidic lens

A method of manufacturing a polymer electrode is provided. The method includes adhering a shadow mask onto a substrate, forming a hydrophilic electrode pattern on the substrate, coating the hydrophilic electrode pattern of the substrate with a conductive polymer water solution, removing the shadow mask, and drying the conductive polymer water solution, thus forming the polymer electrode.

Method of manufacturing polymer electrode and polymer actuator employing the polymer electrode

A curvature control device includes a first fluid that has a light transmitting property and a polar property; a second fluid that has a light transmitting property; a chamber that the first fluid and the second fluid are accommodated without being mixed with each other, wherein a boundary surface between the first fluid and the second fluid comprises a first surface that is a lens surface and a second surface that induces a change in a curvature of the first surface; a first intermediate plate that is disposed in the chamber, and includes a first through-hole that forms a diameter of a lens corresponding to the first surface and a second through-hole that forms a path of the second fluid; and an electrode portion configured to generate an electric field that changes a position of the second surface.

Device and method for controlling curvature of lens surface

An imaging device with a plurality of imaging units is provided. The imaging device includes a supporting substrate, a flexible substrate and a movable unit. The supporting substrate is formed with a hard material, and the flexible substrate includes a plurality of imaging units positioned at least in a width direction. The flexible substrate is fixed at a first edge portion with the supporting substrate, while an opposite second edge portion of the flexible substrate is connected with the movable unit. The movable unit moves the opposite second edge portion of the flexible substrate in the width direction and bends or flattens the flexible substrate. A degree of curvature at which the flexible substrate is bent may vary based on a distance by which the movable unit moves in the width direction, so that a field of view (FOV) of the plurality of imaging units may be adjusted.

Imaging device including a plurality of imaging units

A scanning lens apparatus with a bimorph actuator is provided. The scanning lens apparatus includes: a housing having a hollow cylindrical shape; a first suspension and a second suspension which are parallel to each other, and a first end of each of the first suspension and the second suspension is fixed on an inner surface of the housing; first bimorphs disposed on first surfaces of the first and second suspensions and second bimorphs disposed on second surfaces facing the first surfaces of the first and second suspensions; a first lens which is fixed between a second end of the first suspension and a second end of the second suspension; a second lens fixed parallel to the first lens between the first and second suspensions; and an object lens disposed on an end of the housing to face the second lens with respect to the first lens.

Scanning lens apparatus adopting bimorph actuator

A varifocal lens structure and a method of manufacturing the same, the varifocal lens structure including: a frame having a fluid chamber filled with an optical fluid and formed of polymethylsiloxane (PDMS) containing a predetermined fluid; a transparent cover disposed on a top surface of the frame so as to cover the fluid chamber; a transparent elastic membrane disposed on a bottom surface of the frame so as to form a lower wall of the fluid chamber; and an actuator disposed on the elastic membrane.

Varifocal lens structure and method of manufacturing the same

Growing community of inventors

Suwon-si, South Korea

Kyu-Dong Jung