Samsung Electro-mechanics Co., Ltd.

Kyoung Soo Kim

Seung Do An

Ji Man Cho

The present invention is an apparatus and method for making output signal (AC voltage) levels of MEMS capacitive sensors uniform, each including a microstructure being displaced by a certain force and a fixed electrode for detecting capacitance variation caused by gap size difference between the microstructure and the fixed electrode, the apparatus and method comprising so as to apply actuating current of a predetermined frequency to the microstructure, output a sensing signal of the fixed electrode while receiving a reference offset voltage, compare an RMS level of the sensing signal with a preset RMS level, and then adjust the reference offset voltage of the fixed electrode so that the sensing signal made equal to a target level.

Method and apparatus for uniformizing output signal levels of micro-electro mechanical systems (MEMS) capacitive sensors

The present invention provides a micro inertia sensor and a method of manufacturing the same, the micro inertia sensor includes a lower glass substrate; a lower silicon including a first border, a first fixed point and a side movement sensing structure; an upper silicon including a second border, a second fixed point being connected to a via hole, in which a metal wiring is formed, on an upper side, and an sensing electrode, which correspond to the first border, the first fixed point and the side movement sensing structure; a bonded layer by a eutectic bonding between the upper silicon and the lower silicon; and a upper glass substrate, being positioned on an upper portion of the upper silicon, for providing the via hole on which an electric conduction wiring is formed, thereby aiming at the miniaturization of the product and the simplification of the process.

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Suwon-shi, South Korea

Kyoung Soo Kim