Samsung Electronics Co., Ltd.

Kyoung-jin Park

Soon-cheol Kweon

Byoung-chan Lee

A manufacturing method of a fluid jetting apparatus, including: forming a heat driving part, a membrane, and a nozzle part; and forming a nozzle and jetting fluid chambers sequentially by using one nozzle plate, and assembling the heat driving part, the membrane, and the nozzle part, sequentially.

Process for manufacturing a fluid jetting apparatus

A fluid jetting apparatus for a print head employed in an output apparatus, and a manufacturing process thereof. The process for manufacturing a fluid jetting apparatus includes: (1) forming a heat driving part having a sacrificial layer; (2) forming a membrane on the heat driving part which includes the sacrificial layer; (3) forming a nozzle part on the membrane; and (4) removing the sacrificial layer. The step (1) further includes: (i) forming an electrode and an exothermic body on a substrate; (ii) laminating a working fluid barrier on the electrode and the exothermic body, and forming a working fluid chamber in the working fluid barrier; (iii) forming a protective layer on the working fluid barrier, the electrode, and the exothermic body; (iv) forming a sacrificial layer within the working fluid chamber at a same height as the working fluid barrier. The fluid jetting apparatus includes a heat driving part for generating a driving force, a nozzle part having a jetting fluid chamber interconnected to an exterior through a nozzle, and a membrane for transmitting the driving force generated from the heat driving part to the nozzle part. Here, the heat driving part includes an electrode and a heating element formed on a substrate; a plane layer formed on the substrate at the same height as the electrode and the heating element combined; a protective layer laminated on the plane layer; and a working fluid chamber laminated on the protective layer, the working fluid chamber for holding a working fluid which is to be expanded by the exothermic body to generate the driving force. Accordingly, since the heat driving part, the membrane, and the nozzle part are sequentially laminated to be integrally formed with each other, an adhering process is no longer required. As a result, due to a very simplified manufacturing processes, productivity, reliability, and quality of the fluid jetting apparatus are enhanced, while a percentage of defective parts is decreased.

Fluid jetting apparatus and a process for manufacturing the same

A fluid jetting apparatus for a print head employed in an output apparatus, and a manufacturing process thereof. The process for manufacturing a fluid jetting apparatus includes: ( ) forming a heat driving part having a sacrificial layer; ( ) forming a membrane on the heat driving part which includes the sacrificial layer; ( ) forming a nozzle part on the membrane; and ( ) removing the sacrificial layer. The step ( ) further includes: (i) forming an electrode and an exothermic body on a substrate; (ii) laminating a working fluid barrier on the electrode and the exothermic body, and forming a working fluid chamber in the working fluid barrier; (iii) forming a protective layer on the working fluid barrier, the electrode, and the exothermic body; (iv) forming a sacrificial layer within the working fluid chamber at a same height as the working fluid barrier. The fluid jetting apparatus includes a heat driving part for generating a driving force, a nozzle part having a jetting fluid chamber interconnected to an exterior through a nozzle, and a membrane for transmitting the driving force generated from the heat driving part to the nozzle part. Here, the heat driving part includes an electrode and a heating element formed on a substrate; a plane layer formed on the substrate at the same height as the electrode and the heating element combined; a protective layer laminated on the plane layer; and a working fluid chamber laminated on the protective layer, the working fluid chamber for holding a working fluid which is to be expanded by the exothermic body to generate the driving force. Accordingly, since the heat driving part, the membrane, and the nozzle part are sequentially laminated to be integrally formed with each other, an adhering process is no longer required. As a result, due to a very simplified manufacturing processes, productivity, reliability, and quality of the fluid jetting apparatus are enhanced, while a percentage of defective parts is decreased.

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Kyungki-do, South Korea

Kyoung-jin Park