Samsung Electronics Co., Ltd.

Kyoung Hwan Lee

Sang Min Kim

Sung Ho Jang

Sung Yoon Ryu

Yu Sin Yang

Kang Woong Ko

Young Hoon Sohn

Jae Hyung Ahn

Chi Hoon Lee

Yong Ju Jeon

Hyoung Jo Jeon

Gil Woo Song

Hyo Hyeong Kang

Chul Hyung Yoo

An apparatus for X-ray inspection is provided. The apparatus includes: a stage on which an inspection target is loaded, the stage including a first surface and an opposite second surface; an X-ray generator disposed on or over the first surface of the inspection target and configured to irradiate the inspection target with incident X-rays; and a detection system disposed on or under the second surface of the inspection target and configured to detect first transmitted X-rays transmitted through the inspection target. The detection unit includes a first lens system and a second lens system. The first transmitted X-rays pass through one of the first lens system and the second lens system. The second lens system includes a micro zone plate.

Apparatus for X-ray inspection, and a method for manufacturing a semiconductor device using the same

A method for measuring a semiconductor device is provided. A method for measuring a semiconductor device includes defining an interest area and an acceptable area in a chip area on a wafer; performing a first measurement of the chip area with a spectral imaging device to acquire spectrum data of the chip area; assuming the distribution of the spectrum data of a first pixel in the acceptable area is a normal distribution; calculating a distance from a central point on the normal distribution to second pixels in the interest area; selecting a position of a second pixel having a distance from the central point on the normal distribution greater than a predetermined range, among the second pixels, as a candidate position; and performing a second measurement of the candidate position.

Method for measuring semiconductor device

A focusing control apparatus has a controller and a memory so as to store the control signal of a previous step in the memory. The control signal detected by a photo-detector is changed according to the changes of temperature and light intensity input from a light source. The apparatus performs focusing control by summing in an adder signal output by the controller, which signal is the stored signal on which a computation has been performed, and the new signal input. The apparatus detects and controls an offset signal of the focusing error signal by providing a low-pass filter between the adder and the controller. A feedback circuit including an anti-aliasing circuit is further provided between the output of the adder and the controller, whereby a new focusing control signal is transmitted by correcting the signal stored in the memory after a computation has been performed thereon by the controller. Therefore, the focusing control signal transmitted to the driver of the object lens is stably maintained and the design of a control compensator can be simplified by the use of the feedback circuit.

Method and apparatus for focusing control of an object lens for focusing

Growing community of inventors

Hwaseong-si, South Korea

Kyoung Hwan Lee