Toppan Printing Co., Ltd.

Kyosuke Taguchi

Makoto Nakamura

Katsumi Yamamoto

Kenta Hayashi

Naoyuki Akiyama

A semiconductor device includes a semiconductor substrate including a first surface in which an integrated circuit and an I/O pad electrically connected to the integrated circuit are formed, and a second surface which is an opposite side to the first surface, where a two-stage through-hole is formed in the semiconductor substrate, the semiconductor substrate including a first shape portion having a tapered shape which has a wall surface and of which a diameter of an opening becomes smaller toward a bottom of the hole from the second surface side to a predetermined position of the semiconductor substrate in a thickness direction, and including a second shape portion having a cylindrical shape which extends from the first shape portion to the I/O pad on the first surface side, and that includes an inorganic insulating film which is formed on the wall surface of the two-stage through-hole and the second surface.

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Tokyo, Japan

Kyosuke Taguchi