Hamamatsu-photonics K.k.

Kyosuke Kotani

Tomofumi Suzuki

Tatsuya Sugimoto

Yutaka Kuramoto

Katsumi Shibayama

Noburo Hosokawa

Hirokazu Yamamoto

Takuo Koyama

Daiki Suzuki

Yoshihisa Warashina

Kohei Kasamori

Ryosuke Okumura

Masashi Ito

Nao Inoue

Yuya Iwazaki

Hiromichi Tozuka

In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

Optical device

An optical device includes a support portion, a movable portion; and a pair of torsion bars. An optical function portion is provided on one surface of the movable portion and a rib portion is provided on the other surface of the movable portion. The rib portion includes eight extending portions of first to eighth extending portions. When setting directions in which the first to eighth extending portions extend as first to eighth extending directions respectively, and setting an angle between the first and second extending directions as a first angle, an angle between the third and fourth extending directions as a second angle, an angle between the fifth and sixth extending directions as a third angle, and an angle between the seventh and eighth extending directions as a fourth angle, each of the first and second angle is larger than each of the third and fourth angle.

Optical device production method

An optical device includes: a base; a movable portion including an optical function portion; an elastic support portion supporting the movable portion so that the movable portion is movable along a first direction; a first comb electrode provided to the base and including a plurality of first comb fingers; and a second comb electrode including a plurality of second comb fingers. The elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever. The second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar. The first comb finger and the second comb finger adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction.

Optical device and method for manufacturing same

A mirror unitincludes a mirror deviceincluding a baseand a movable mirror, an optical function member, and a fixed mirrorthat is disposed on a side opposite to the mirror devicewith respect to the optical function member. The mirror deviceis provided with a light passage portionthat constitutes a first portion of an optical path between the beam splitter unitand the fixed mirror. The optical function memberis provided with a light transmitting portionthat constitutes a second portion of the optical path between the beam splitter unitand the fixed mirror. A second surfaceof the baseand a third surfaceof the optical function memberare joined to each other.

Mirror unit and optical module

An optical device includes a base that includes a main surface, a movable unit that includes an optical function unit, an elastic support unit that supports the movable unit so that the movable unit is movable along a predetermined direction perpendicular to the main surface, a fixed comb electrode that includes a plurality of fixed comb fingers, and a movable comb electrode that includes a plurality of movable comb fingers which are disposed alternately with the plurality of fixed comb fingers. At least one of the movable unit and the elastic support unit includes an electrode support portion that supports the movable comb electrode. The electrode support portion includes a rib portion that is formed so that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb fingers in the predetermined direction.

Optical device having fixed and movable comb electrodes

An optical device includes: a base which includes a main surface; a movable mirror which includes a mirror surface; a first and a second elastic support portions which support the movable mirror so as to be movable along a first direction perpendicular to the main surface; an actuator which moves the movable mirror; and a first optical function portion which is disposed at one side of the movable mirror in a second direction perpendicular to the first direction. The first elastic support portion includes a pair of first levers extending from the movable mirror toward both sides of the first optical function portion in a third direction perpendicular to the first and the second directions. A length of each of first levers in the second direction is larger than the shortest distance between an outer edge of the mirror surface and an edge of the first optical function portion.

Optical device including movable mirror and first light passage

An optical device includes a support portion a movable unit and a pair of torsion bars disposed on both sides of the movable unit on a first axis. The movable unit includes a main body portion, a ring-shaped portion surrounding the main body portion when viewed from a predetermined direction perpendicular to the first axis, two connection portions connecting the main body portion and the ring-shaped portion to each other, and a rib portion provided to the main body portion. Each of the two connection portions includes two connection regions that are separated from each other by a space and the each of the two connection region connects the main body portion and the ring-shaped portion to each other. The rib portion includes four extending portions radially extending between a center of the main body portion and the four connection regions respectively when viewed from the predetermined direction.

A method for manufacturing an optical device includes: preparing a semiconductor substrate that includes a portion corresponding to a base, a movable unit, and an elastic support portion; forming a first resist layer in a region corresponding to the base on a surface of a first semiconductor layer which is opposite to an insulating layer; forming a depression in the first semiconductor layer by etching the first semiconductor layer using the first resist layer as a mask; forming a second resist layer in a region corresponding to a rib portion on a bottom surface of the depression, a side surface of the depression, and the surface of the first semiconductor layer which is opposite to the insulating layer; and forming the rib portion by etching the first semiconductor layer until reaching the insulating layer using the second resist layer as a mask.

A processer of an optical module is configured to control a voltage signal having a frequency for causing a movable mirror to resonate, and perform an intensity acquisition process. The intensity acquisition process is a process of acquiring a measurement light intensity of the interference light of the measurement light M times at a first time interval based on the frequency in each of a plurality of cycles among P cycles continuous in the voltage signal, acquiring an addition value of a plurality of the measurement light intensities mutually corresponding for the same number of times, acquiring a laser light intensity of the interference light of the laser light N times at a second time interval based on the frequency in each of the plurality of cycles, and acquiring an addition value of a plurality of the laser light intensities mutually corresponding for the same number of times.

Optical module, signal processing system, and signal processing method

An optical device includes: a base that includes a main surface; a movable unit that includes an optical function unit; and an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a first direction perpendicular to the main surface. The elastic support unit includes a lever, a first torsion support portion that extends along a second direction perpendicular to the first direction and is connected between the lever and the movable unit, and a second torsion support portion that extends along the second direction and is connected between the lever and the base. A torsional spring constant of the first torsion support portion is greater than a torsional spring constant of the second torsion support portion.

An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.

In an optical device, when viewed from a first direction, first, second, third, and fourth movable comb electrodes are respectively disposed between a first support portion and a first end of a movable unit, between a second support portion and a second end of the movable unit, between a third support portion and the first end, and between a fourth support portion and the second end of the movable unit. The first and second support portions respectively include first and second rib portions formed so that the thickness of each of the first and second support portions becomes greater than the thickness of the first torsion bar. The third and fourth support portions respectively include third and fourth rib portions formed so that the thickness of each of the third and fourth support portions becomes greater than the thickness of the second torsion bar.

In an optical device, a movable unit includes a main body portion, a frame portion that surrounds the main body portion with a predetermined interval from the main body portion, and a plurality of connection portions which connect the main body portion and the frame portion to each other. A width of each of the connection portions is larger than an interval between the main body portion and the frame portion, and is smaller than a distance from a connection position with each of the connection portions in the frame portion to any of a connection position with each of a pair of first torsion support portions and a connection position with each of a pair of second torsion support portions.

An optical device includes an elastic support portion which includes a torsion bar extending in a second direction perpendicular to a first direction and a nonlinearity relaxation spring connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A first comb finger of a first comb electrode and a second comb finger of a second comb electrode which are adjacent to each other face each other in the second direction.

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Hamamatsu, Japan

Kyosuke Kotani